Development of multifunctional active tactile sensor using magnetic micro-actuator

提出了一种磁力驱动的多功能主动触觉传感装置。本发明的优点是，单个设备可以检测接触物体的接触力、弹性系数和阻尼系数等多种物理量。本课题主要研究了以下几个方面的内容：(1)器件设计我们确定了用于检测手指硬度的传感器元件和平面线圈驱动元件的规格。(2)制作工艺我们应用微电子机械系统(MEMS)技术开发了这两种元件的制作工艺。制作的传感器尺寸为6.0mmx6.0mmx425μm，膜片尺寸为4.0mmx4.0mmx10μm，背面安装了1.3TNdFeB永磁体(1mmx1mmx1 Mm)。(3)硬度检测提出了硬度检测的理论模型，并用不同型号的硅橡胶对弹性系数和阻尼系数的检测进行了实验验证

We proposed a multifunctional active tactile sensor device driven by magnetic force. The device has an advantage that single device can detect multiple physical values, such as contact-force and elastic-and damping-coefficient of a contacted object. We studied the followings in this project.(1)Device designWe determined the specification for the sensor element and the flat coil driving element for detecting the hardness of human fingers.(2)Fabrication processWe developed fabrication process of both elements by applying micro-electro-mechanical systems(MEMS) technology. The size of fabricated sensor and diaphragm with Si-mesa was 6.0 mm x 6.0 mm x 425 μm and 4.0 mm x 4.0 mm x 10 μm, respectively, and attached a commercially available 1.3 T Nd-Fe-B permanent magnet (1 mm x 1 mm x 1 mm)to the backside. The size of flat coil with 14 turns was 4.2 mm x 4.2 mm x 35 μm. We realized hybrid active tactile sensor system by assembling them for detecting multiple physical values.(3)Hardness detectionWe also proposed a theoretical sensor model of the hardness detection, and experimentally confirmed both of elastic-and damping-coefficient detection by using different types of silicone rubbers