Application of New Materials to Designing of "Nano-mechanism"

研究了树脂混凝土、精细陶瓷、压电陶瓷等新材料在超精密机床设计中的应用。树脂混凝土由于其阻尼比高、导热系数低而适合作为本机的基础材料。对其力学性能进行了测试，并考虑了设计原则。精细陶瓷;氧化铝和氧化锆，具有高耐磨性，被认为适用于表面材料。在大气和真空环境下测试了它们的摩擦性能，并与普通树脂进行了对比。氧化铝陶瓷比刚度高，自重变形小，易于精密研磨。因此，优选作为超精密线性导轨结构材料。这些应用程序也得到了测试。直线电机可以非常合理地驱动滑块，而不需要螺杆和螺母。但摩擦力的大小影响进给速度的稳定性及其它性能。研究了其效果和控制方法。压电驱动器有望实现高精度的直线进给运动。将其应用于切深控制，实现了纳米级进给，线性度良好。压电陶瓷还应用于精密对准机构，如光纤插头加工专用机床。为了尽可能减小工件的变形，对多孔烧结尼龙作为真空吸盘的吸盘面材料进行了试验研究，并对其吸盘性能进行了分析。

The applications of so-called new materials; resin concrete, fine ceramics, piezo-electric actuater and so on, to the ultra precise machine tool design are investigated. Resin concrete suits for the base material of the machine mainly because of its high damping ratio and low coefficient of thermal conductivity. Its mechanical properties were tested and design rules were considered. Fine ceramics; alumina and zirconia, have high wear resistance and considered to be suitable for the slideway face material. Their frictional characteristics were tested both in atmospheric and vacuum environment, comparing with the fluoric resin. Alumina ceramics have high specific rigidity resulting in smaller deformation by its own weight and are easy to be finished precisely by lapping. Therefore it is preferable as the ultra precision linear guide structural material. Such applications were also tested. Linear motor can drive slider very reasonably without the need of screw and nut. But the slideway friction affects the stability of feed velocity and other performances. Its effect as well as the control method are investigated. Piezo-electric actuater is expected to be able to realize the precise linear feed motion with very high resolution. It was applied to the depth of cut control, showing the results of nanometer order feed with acceptable linearity. Also the piezo was applied to the precise alignment mechanism, for example, a special machine tool for optical-fiber plug machining. The workpiece deformation due to chucking should be restrained as small as possible.Porous sintered nylon were tested as the vacuum chuck face material, and the chucking properties are investigated.