Construction of nano manufacturing world

最近，工程技术的进步使半导体和磁头的制造精确到0.1微米量级，而物理学的进步使原子的操作达到1埃量级。虽然1-100纳米量级的中间区域需要主动制造或操作，但它仍然是被动观察的。研究有一种方法，即人类进入该区域；他进入小区域，观察、触摸、移除和测量它。为了满足工程师的需求，我们建造了一个桌面大小的工厂，一个“纳米制造世界”。它具有机械元件：1)用于切割、组装和测量的微型工具，2)用于蚀刻1 nm量级结构的快原子束(FAB)，3)具有16个运动自由度的纳米操作器，4)用于多方向观察的扫描电子显微镜(SEM)，5)进入微型世界的远程操作系统，6)用于在人类世界和微型世界之间转换物理参数的软件。具体来说，将这些元素合成到真空室中：FAB室、扫描电子显微镜和加载。微部件被固定在托盘上，由机器人在房间之间转移，并由人在观察SMM的过程中进行操作。通过对记录头悬架、微透镜阵列、微点存储器和量子元件的评估，我们证实了该系统的有效性。

Recently, Progress of engineering leads to manufacture semiconductors and magnetic heads precisely on the order of 0.1 mum, while progress of physics does to operate an atom on the order of 1 angstrom. Though an inbetween region on the order of 1-100nm needs to be manufactured or operated actively, it is still observed passively.The research has an approach where the human enters the region ; he moves into the small area, observes, touches, removes and measure it. To satisfy the requirement of engineers, wer constructed a table-sized factory, a "nano manufacturing world". It has mechanism elements : 1) micro tools for cutting, assembling and measuring, 2) FAB (Fast Atom Beam) to etch a structure on the order of 1 nm, 3) nano manipulators with 16 degrees of freedoms of motions, 4) SEM (Scanning Electron Microscope) to observe in multi-direction, 5) remote operating system to enter the micro world and 6) software to transform physical parameters between the human world and the micro world. Concretely, the elements are synthesized to vacuum chambers : FAB room, SEM and loadlocked. Micro-parts are fixtured on a pallet, which is transferred by a fobot between the rooms, and are operated by the human in observing with SEMs.From the evaluations to manufacture a suspension of recording head, a micro lens array, a micro dotted memory and a quantum element, we confirmed the effectiveness of the sytems.