Development of Microfabrication and Measurement System by Multiple Miniature Robots with Micro Tools in High Vacuum Chamber

-a.扫描探针显微镜（Sasaki和Hara）研制了几种用于扫描样品表面的精细探针，即隧道电流探针、原子前向场探针和近场探针，并对这些探针的特性进行了研究。此外，还利用微探针的脉冲放电对样品进行了微细加工，这对微器件的生产具有一定的指导意义。B.超高真空室用微型机器人（Aoyama和Sasaki）传统的微型机构是为在大气条件下移动而设计的。然而，必须重新考虑在真空条件下工作。那么机械元件、连接部件和电气布线就应该改进这么多。最后，成功地组装了即使在10^5 Torr的高真空条件下也能移动的新型微型机器人，以控制微加工过程。C.高真空条件下半导体材料表面的微观行为研究了几种金属和陶瓷在超高真空条件下的表面状态，达到原子尺度。样品和探针原位接触之间的干扰进行了表征。该微型机器人可用于高真空条件下的微细加工。

-a. Scanning Probe Microscope Imprementation and Microfabrication (Sasaki and Hara)Several kinds of fine probe, tunneling current, atomic forow and near field, for scanning the surface of sample were developed and characteristics of those probes were investigated. Furthermore the pulse discharge from micro probe was applied to the sample to make the microscopic machining which should be useful for micro devices production.-b. Miniature Robot for ultra high vacuum chamber (Aoyama and Sasaki)Convensional miniature mechanisms are designed for moving in the atmospher condition. However it must be reconsidered to work in vacuum condition. Then the mechanical elements, joint components and electrical wiring should be improved so much. Finally the new miniature robot which can move even in high vacuum condition of 10^5 Torr was assembled successfully to control the microfabrication process.-c. Microscopic behavior of semiconductor material surface in high vacuum condition (Murakami)Surface condition of several metal and ceramics were investigated to the level of atoic size in ultra high vacuum condition. Interference between the sample and the probe in-situ contact were characterized. And the miniature robot with a micro discharge probe could be made for microfabrication in high vacuum condition.