Study on development of electrodeposited diamond wire tool which ensures high machining efficiency and longer life of tool

本应用研究的目的是开发一种新型电沉积金刚石线工具，以保证高的加工性能和更长的刀具寿命。为达到上述目的，研制了(1)在钢琴丝（直径0.2mm）上电沉积螺旋形金刚石颗粒的螺旋丝工具和(2)在由两根钢琴丝（直径0.1mm）组成的扭丝上均匀电沉积金刚石颗粒的扭丝工具。此外，本文还对新型丝线刀具的强度特性和加工性能进行了试验研究。注意到以下几点。从新型钢丝工具的断裂载荷强度特性分析结果来看，螺旋钢丝工具与使用phi0.2mm钢琴丝的传统钢丝工具相当，而螺旋钢丝工具与传统钢丝工具相比有减小的趋势，其截面积减小了50%左右。然而，由于钢琴丝直径的减小，材料强度的提高，这一降低率约为30%。从对新型丝刀扭扭强度特性的研究结果来看，螺旋丝刀和扭扭丝刀都比传统丝刀提高了约3倍。从新型线刀的加工效率分析结果来看，螺旋线刀和绞丝刀的加工效率分别是传统线刀的1.8倍和2倍左右。此外，很明显，由于在每个线切割工具上形成螺旋形的切屑袋，新型线切割工具改善了工作流体的内流出效果和切屑的消除效果。与传统的线材工具相比，扭曲线材工具的使用寿命有了显著的提高。从新型丝线刀具刃口切削精度和晶圆粗糙度的分析结果来看，螺旋丝线刀具与传统丝线刀具相比，刃口切削精度略有下降。然而，很明显的是，在提高加工效率的同时，用绞丝刀加工的精度与传统的线刀相当。少

This application study aims to develop the new electrodeposited diamond wire tool which ensures high machining performance and makes a longer life of tool. In order to be able to achieve these purpose, (1) the spiral wire tool which is electrodeposited spiral diamond grains on a piano wire (phi0.2mm), and (2) the twisted wire tool which is electrodeposited diamond grains uniformly on the twisted wire consisted of two piano wires (phi0.1mm) are developed. In addition, these new wire tools are not only produced by way of trial but also examined on both the strength characteristics and the machining performance experimentally. The following points have been noted.1.From the results on the strength characteristics for breaking load of the new wire tools, the spiral wire tool is equal to the conventional wire tool used a phi0.2mm piano wire, and the twisted wire tool tends to decrease to be compared with the conventional wire tool owing to decrease of about 50% in the cross section area of … More the tool. However, this decrease ratio is about 30% because of the improvement of material strength due to decrease of a piano wire diameter.2.From the results on the twisted strength characteristics of the new wire tools, both spiral and twisted wire tools improve approximately 3 times of the conventional wire tool.3.From the results on the machining efficiency by the new wire tools, each of the spiral wire tool and the twisted wire tool shows improvement of aproximately 1.8 and 2 times in maximum of the conventional wire tool. Furthermore, it is clear that the new wire tools have improved the in-outflow effect of the working fluid and the eliminating effect of cutting chips owing to the spiral chip-pocket formed on an each wire tool.4.Twisted wire tool shows a remarkable improvement in the tool life compared with the conventional wire tool.5.From the results on the machining accuracy of edge chipping and wafer roughness by the new wire tools, the spiral wire tool shows a little deterioration compared with the conventional wire tool. However, it is clear that the machining accuracy by the twisted wire tool is presented an equal quantity with the conventional wire tool even though the machining efficiency by the twisted wire tool improver remarkably. Less