Development of Ultraprecision ＆ Ultrafine Machining System for Fabricating Nano-Devices

近年来，在先进科学和工程领域，对纳米器件的制造的需求有所增加。特别是，为了制造具有三维纳米结构的功能元件，需要进行大工作面积的超精密加工。为满足这一需求，国内外学者对超精密机床的发展进行了大量的研究，但有关超精密机床发展的学术文献较少，因此，本研究项目新开发了一种用于制造纳米器件的超精密、超细加工系统，并通过一系列超精密加工实验对其性能进行了评价。本项目所开发的加工系统是一种完美的非接触式结构，可以设计成最大限度地减少机床结构中的各种误差因素。基于新的设计理念，所开发的超精密超精细加工系统由以下基本结构模块组成：(1)新颖的X-Y-θ平面运动空气静压工作台系统，(2)用于纳米加工的空气涡轮驱动高速空气静压主轴系统，(3)配备创新重力补偿器的立式纳米运动工作台系统，(4)具有送风温度控制功能的有效热变形控制系统，(5)基于微传感器的超精密加工状态在线监测系统；(6)稳定的整机结构，将新材料应用于所有基本结构模块。最后，实际纳米加工实验结果证实，所研制的超精密、超精细加工系统性能显著，适用于纳米器件的纳米加工。

The demand for fabrication of nano-devices has recently increased in the field of advanced science and engineering. In particular ; an ultraprecision machining with large work area has been required for producing functional elements with three-dimensional nano-structures. In order to meet such requirements, many studies related on the development of ultraprecision machine tool have been performed so far; while there have been only few academic literatures on such developments.In this research project, therefore, an ultraprecision and ultrafine machining system for fabricating nano-devices was newly developed and then the performances were evaluated through a series of ultraprecision machining experiments. The machining system developed in this project was of a perfect non-contact structure which could be design to minimize various error factors within the machine structure.The developed ultraprecision and ultrafine machining system based on a new design concept was constructed from the following fundamental structural modules :(1)An novel X-Y-θ planar motion aerostatic table system,(2)An air turbine-driven high speed aerostatic spindle system for nano-machining,(3)A vertical nano-motion table system equipped with innovate gravity compensator,(4)An effective thermal deformation control system with temperature control function of supply air,(5)An in-process ultraprecision machining status monitoring system with micro-sensor, and(6)A stable entire machine structure which was applied new materials to all of fundamental structural modules.Finally, the results of actual nano-machining experiments confirmed that the developed ultraprecision and ultrafine machining system provides remarkable performances and then is suitable for nano-machining of nano-devices.