Research on the high-precision machine tools integrated with a measurement artifact and control model

本文提出了一种系统的机床几何误差建模与补偿方法。为了将几何误差与其他误差分离开来，设计了平面工件，并引入了控制模型。结果表明：(1)将高响应、高分辨率的z轴集成到所研制的机床中，通过设计高响应伺服系统，将z轴的响应提高到100Hz。(2)利用集成的平面伪影和激光位移传感器，测量了运动直线度，并利用傅里叶分析建立了运动直线度模型。(3)以非旋转刀具加工平面为例，验证了该方法的有效性。在45mm ~ 70mm平面上，相对位移波动由1.3 μ P-V减小到0.5 μ P-V。用单晶金刚石刀具进行了加工实验，将轮廓曲线的直线度从1.0 μ m降低到0.4 μ m。

In this research, a systematic method to model and compensate geometric errors of machine tools is developed. In order to separate geometric errors from other errors, the developed machine tool has a flat artifact and a control model are introduced. The obtained results are as follows :(1) AZ-axis, which has high response and high resolution, is built in the developed machine tool Designing high response servo system, response of the Z-axis is improved to be 100Hz.(2) By using an integrated flat artifact and a laser displacement sensor, straightness of motion is measured and modeled by using the Fourier analysis.(3) A flat surface machining with nonrotational cutting tools was tested to validate our method. On the plane of 45mm 70 mm, the fluctuation of the relative displacement was reduced from 1.3 to 0.5 μm P-V. Machining experiments with a single-crystal diamond tool were also carried out and the straightness of the profile curve was reduced from 1.0 to 0.4 μ m.