Study of Frequency-Change-Type High-Sensitivity Two-Axis Acceleration Sensor

提出了一种变频型两轴加速度传感器的结构，并采用有限元法进行了设计。在这种结构中，所分析的外加加速度与共振频率变化之间的关系变为线性关系。并提出了实现高灵敏度的方法。选择施加加速度的轴和采用弯曲支撑杆都是提高传感器灵敏度的有效方法。在引力场中测量传感器的特性。结果表明，传感器的特性分析与实验结果基本一致。

The construction of a frequency-change-type two-axis acceleration sensor is proposed and is designed using the finite-element method. The analyzed relationship between the applied acceleration and the resonance frequency change becomes linear in this construction. Moreover, methods for realizing high sensitivity are proposed. Selecting the axis to apply the acceleration and using bent support bars are both effective methods to increase sensor sensitivity. The sensor characteristics are measured in the gravitational field. As a result, the analyzed characteristics of the sensor agreed with the experimental ones.