Elucidation of Mechanism of Film Hardening of Amorphous CarbonsBased on the High-Resolution Laser Spectroscopy

在本工程中得到以下结果：(1)鉴定了非晶态氮化碳薄膜中氮原子的前驱体，成功制备了高氮含量的薄膜。(2)阐明了ECR等离子体和稀有气体微波放电流中起始分子的分解机理。(3)阐明了射频偏置电压作用下非晶碳及相关材料薄膜硬化的机理。

The following results are obtained in this project.(1) The precursors of the nitrogen atoms in amorphous carbon nitride films are identified, and films possessing high-nitrogen contents are successfully fabricated.(2) The mechanism of the decomposition of the starting molecules are elucidated for the ECR plasma and microwave-discharge flow of rare gases.(3) Mechanism of the film hardening of amorphous carbon and related materials are elucidated upon the application of radio-frequency bias voltage to the substrates.