Excimer laser for plasma generation and applications

所要求的设备是一个准分子激光器，它将支持我的研究计划的许多方面，即脉冲沉积，激光诱导等离子体光谱和高密度等离子体诊断，用于先进光子材料的纳米图案。我的研究计划的驱动动机与更好地理解低温等离子体所涉及的物理和化学现象的关键需求有关，因为需要在特定应用的背景下优化其参数。在这种背景下，几年来，我一直领导着蒙特雷姆萨大学的一个研究项目，研究用于材料加工和分析的先进等离子体源的开发、表征和优化。该计划依赖于对等离子体科学的深刻理解，以及对等离子体诊断和建模的详尽知识，以及对等离子体应用的浓厚兴趣。我打算以我以前的成功工作为基础，继续在等离子体科学及其应用方面取得优异成绩。最近，一项重要的工作也致力于整合该计划的各个互补方面，以开发用于光子器件的先进材料工艺。在我打算追求的方面中，让我们注意到以下关键问题：(I)开发和实施基于激光的创新等离子体诊断，（ii）追求和发展对先进材料的高密度等离子体蚀刻和新光子器件制造工艺优化的研究，以及（iii）追求和发展在材料和纳米材料合成和分析背景下的激光等离子体研究。该设备将取代1994年获得的准分子激光器，该激光器几个月前发生重大故障，导致研究严重延误。

The equipment requested is an excimer laser that will support many aspects of my research program, namely pulsed deposition, laser-induced plasma spectroscopy and diagnostics of high-density plasmas for nanometer patterning of advanced photonic materials. The driving motivation of my research program is related to the crucial needs for better understanding the physical and chemical phenomena involved in low temperature plasmas as required for optimizing their parameters in the context of specific applications. In this context, for several years, I have been leading at the Université de Montréal a research program on the development, characterization and optimization of advanced plasma sources for applications to materials processing and analysis. This program relies on a deep understanding of plasma science and on an exhaustive know-how in plasma diagnostics and modeling, together with a strong interest for plasma applications. I intend to build upon my previous successful work and continue to excel in plasma science and their applications. An important effort has been also recently devoted to integrate the various complementary aspects of the program to develop advanced materials processes for photonic devices. Among the aspects that I intend to pursue, let us note the following key issues : (i) develop and implement innovative plasma diagnostics based on lasers, (ii) pursue and develop the investigation of high-density plasma etching of advanced materials and process optimization for the fabrication of new photonic devices, and (iii) pursue and develop the investigation of laser plasmas in the context of materials and nanomaterials synthesis and analysis. The equipment will replace an excimer laser acquired in 1994 and that suffered from a major failure a few months ago, resulting in a severe research delay.