Development of actuators for precision and microsystems applications

该研究计划受到许多工业应用的推动，这些应用需要开发新的执行器概念，并将其用于开发提供纳米精度的多轴定位器、用于无线应用的微型机电系统以及用于生物医学测试中的分配和流体操纵任务的微型执行器。具体地说，该计划侧重于三项主要任务，并基于研究组内部开发的主要贡献：1.基于小组对压电陶瓷(PZT)表征和直线电机设计的研究，该研究将建立PZT执行器中非线性效应的实时补偿算法，用于kHz频率范围内的应用，并开发具有纳米精度的PZT驱动线性定位器的新设计。2.小组在微流体领域的活动导致开发新型微泵、点胶阵列和混合室。未来的工作将继续开发微流控开发和测试基础设施，以促进微机械加工技术、微驱动/传感和微液压概念的整合，以开发集成各种流体处理方案和生产高密度DNA和蛋白质载玻片所需的关键微流控部件的芯片实验室设备。这包括加深对PZT薄膜致动器及其与MEMS器件的集成的了解，以及使用薄膜PZT和静电致动器开发高精度(皮升范围)的点胶头。3.研究小组开发了一种新型的双层双向MEMS静电致动器，其行程比传统致动器高5倍。这种新型的致动器可以用标准的微加工工艺制造。未来的工作将集中在基于所开发的致动器平台建立用于下一代无线通信系统的高性能RF MEMS可调电容器的设计、制造和封装。

The research program is motivated by many industrial applications that require the development of novel actuator concepts and their use in developing multi-axis positioners offering nanometer accuracy, Micro Electro Mechanical Systems for wireless applications, and micro actuators for dispensing and fluid manipulation tasks in biomedical testing. Specifically, the program focuses on three main tasks and is based on major contributions developed within the research group:1.Based on research done by the group on piezoceramic (PZT) characterization and linear motor design, the research will establish real-time compensation algorithms for non-linear effects in PZT actuators for applications in the KHz frequency range and develop novel designs of PZT actuated linear positioners offering nanometer accuracy.2.Activities within the group in the area of microfluidics led to developing novel micropumps, dispensing arrays and mixing chambers. Future work will pursue developing a microfluidic development and testing infrastructure that facilitates the integration of micro-machining technology, micro actuation/sensing and microhydraulic concepts to develop lab-on-a-chip devices that integrate the critical microfluidic components needed for various fluid handling protocols and the production of high-density DNA and protein slides. This includes developing an understanding of PZT thin film actuators and their integration into MEMS devices, and developing high precision (picoliter range) dispensing heads using thin film PZT and electrostatic actuators.3.The research group has developed a novel two-layer bi-directional MEMS electrostatic actuator that offers a stroke that is 5 times higher than conventional actuators. The novel actuator can be fabricated using standard micromachining processes. Future work will focus on establishing designs, fabrication and packaging of high performance RF MEMS tunable capacitors for next generation wireless communication systems based on the developed actuator platform.