RF and microwave plasmas intended for applications to nanometer pattern transfer and nanomaterials synthesis

低温等离子体(即电子温度低于约10 eV)是一系列先进工艺的核心，对竞争激烈的经济部门的应用至关重要。要在具体应用的背景下优化其参数，绝对需要了解此类等离子体中所涉及的物理和化学现象。这样的基础研究是我研究计划的驱动力。在此背景下，几年来，我一直在蒙特利尔大学领导一个研究项目，该项目旨在开发、表征和优化用于材料加工和分析的先进等离子体源。该项目依赖于对等离子体科学的深入理解和对等离子体诊断和建模的详尽知识，以及对等离子体应用的浓厚兴趣。这项研究工作在等离子体科学和材料处理和分析应用方面都取得了极大的成功。在接下来的几年里，我打算继续利用这一专长，沿着以下方向在等离子体科学及其应用方面进行创新：(1)继续研究高密度等离子体，以优化图案向先进材料的转移，特别侧重于CBN，一种在光子学中有潜在影响的电光材料，以及用于制造纳米压印光刻模板的铬；(2)开发和表征低压磁约束尘埃等离子体，特别侧重于磁场对纳米颗粒形成和传输的影响；以及(3)研究和优化木材加工背景下的射频大气压等离子体。该计划产生的新科学知识以及由此产生的高素质人员培训将影响低温等离子体领域，并将刺激与加拿大传统和高科技行业相关的应用程序的开发。

Low temperatures plasmas (i.e. with electron temperatures less than about 10 eV) are at the heart of a broad range of advanced processes crucial for applications in highly competitive sectors of economy. The understanding of the physical and chemical phenomena involved in such plasmas is absolutely required for optimizing their parameters in the context of specific applications. Such fundamental studies are the driving motivation of my research program. In this context, for several years, I have been leading at Université de Montreal a research program on the development, characterization and optimization of advanced plasma sources for applications to materials processing and analysis. This program relies on a deep understanding of plasma science and on an exhaustive know-how in plasma diagnostics and modeling, together with a strong interest for plasma applications. This research effort in both plasma science and materials processing and analysis applications has been extremely successful. Over the next years, I intend to continue to build upon this expertise to innovate in plasma science and its applications along the following lines: (i) pursue the investigation of high-density plasmas for optimized pattern transfer into advanced materials, with a specific focus on CBN, an electro-optical material with potential impact in photonics, and on chromium, used in the fabrication of templates for nanoimprint lithography; (ii) develop and characterize low-pressure magnetically confined dusty plasmas with a specific focus on the influence of the magnetic field on nanoparticles formation and transport; and (iii) investigate and optimize radiofrequency atmospheric pressure plasmas in the context of wood processing. The new scientific knowledge generated from this program together with the resulting training of highly qualified personnel will impact the field of low temperature plasmas and will stimulate the development of applications relevant for Canadian traditional and high-technology industries.