Development of High Power Microwave Plasma Enhanced Chemical Vapor Deposition System for High Speed Large Area Synthesis of Diamond and Graphene

该项目旨在发展新的研究伙伴关系之间的杨博士在萨斯喀彻温大学 和Plasmionique Inc.为了解决将高功率微波耦合到大化学蒸气中的问题， 沉积（CVD）系统，以实现高质量金刚石片的大面积和高速合成， 石墨烯。 博士杨一直致力于CVD合成和金刚石的表征三十年，她的团队 已成功开发出许多创新技术来合成金刚石，碳纳米管，石墨烯， 石墨烯和其他碳纳米结构在各种基底材料上具有上级的性能， 应用范围。另一方面，Plasmionique已经开发了各种类型的等离子体增强 CVD系统。该公司是第一个也是唯一的微波等离子体增强CVD系统的供应商， 加拿大和世界上其他类型等离子体增强气相沉积系统的主要供应商。 很明显，杨博士的集团与本公司之间的伙伴关系的发展将产生 强大的协同作用，为加拿大的经济利益，这将是巨大的，因为反应器和合成 开发的技术可以直接交付给市场，以充分利用独特和优秀的 金刚石和石墨烯的各种工业和生物医学应用的性能。的环境和 社会影响将更加显著，因为开发的新反应堆和新工艺将使大规模的 金刚石和其他碳材料的高速合成，这将使更高效的太阳能电池， 更有效的工具，新的电子发射源，大大改进的生物医学植入物，以及磨损和 用于各种结构和系统的耐腐蚀部件，从而最大限度地减少污染和浪费 提高生活质量。

This project aims to develop new research partnership between Dr. Yang at the University of Saskatchewan and Plasmionique Inc. to address the problems of coupling high power microwave into large chemical vapor deposition (CVD) systems to enable large area and high speed synthesis of high quality diamond sheets and graphene. Dr. Yang has been working on CVD synthesis and characterization of diamond for thirty years and her team has successfully developed many innovative techniques to synthesize diamond, carbon nanotubes, graphene, graphene, and other carbon nanostructures with superior properties on various substrate materials for a wide range of applications. On the other hand, Plasmionique has been developed various types of plasma enhanced CVD systems. The company is the first and only supplier of microwave plasma enhanced CVD systems in Canada and the major supplier of other types of plasma enhanced vapor deposition systems in the world. It is evident that the development of partnership between Dr. Yang's group and the Company would produce strong synergy for the economic benefit of Canada, which will be enormous as both the reactor and synthesis techniques developed can be directly delivered to the market to make full use of the unique and outstanding properties of diamond and graphene for various industrial and biomedical applications. The environmental and social impact would be more significant as the developed new reactors and the new processes will enable large area high speed synthesis of diamond and other carbon materials, which will enable more efficient solar cells, more efficient tools, novel electron emission sources, much improved biomedical implants, and wear and corrosion resistant components for various structures and systems, and thus minimizing pollution and wastage and improving life quality.