Development of Electromagnetic Reluctance Motion Actuator for Scanning and Advanced Manufacturing Applications for Industry 4.0

智能制造的进步对工业4.0至关重要，这需要开发新的高性能电子设备和高加速度运动系统。市场问题是，向工业4.0迈进需要更高的加速、准确性和生产力。各种应用都需要高加速度运动控制，包括机器人、CNC制造、生物医学、显微镜、化学、光谱成像、纳米结构扫描、微米和纳米制造、光谱学以及非线性和超快光学。工业运动系统所能提供的加速度是有限的。半导体制造业就是一个很好的例子;提高集成电路（IC）的吞吐量和性能对于满足工业4.0中各种创新工业应用对未来微米和纳米技术日益增长的需求至关重要。该产品是一种低成本、紧凑、集成和可控的精密运动系统，由磁阻致动器（RA）驱动。当与其他电磁致动器相比时，RA的电磁特性使得能够以小的致动器尺寸产生更高的力，从而产生具有低冷却要求的更节能的致动系统。所产生的力增加可满足更高的加速度需求，从而实现更快、更高效的高精度运动控制系统控制。此外，RA可以由铁磁材料制成，铁磁材料广泛用于变压器、断路器和电动机的生产，并且容易以低价格商购。RA目前仅用于涉及磁轴承和磁开关的少数应用中。

Intelligent manufacturing advancements are critical for Industry 4.0, which necessitates the development of new high-performance electronic devices and high-acceleration motion systems. The market issue is that higher acceleration, accuracy, and productivity are required to progress toward Industry 4.0. High acceleration motion control is required for a variety of applications, including robotics, CNC fabrication, biomedical, microscopy, chemistry, spectrometry imaging, nanostructure scanning, micro and nanomanufacturing, spectroscopy, and non-linear and ultrafast optics. The amount of acceleration that industries' motion systems can provide is limited. The semiconductor manufacturing industry is an excellent example; increasing the throughput and performance of integrated circuits (IC) is critical to meeting the growing demands of future micro and nanotechnologies for various innovative industrial applications in Industry 4.0.The product is a low-cost, compact, integrated, and controllable precision motion system powered by a Reluctance Actuator (RA). When compared to other electromagnetic actuators, the electromagnetic properties of RA enable higher forces to be generated with a small actuator size, resulting in a more energy-efficient actuation system with low cooling requirements. The increased force generated enables higher acceleration demands, resulting in faster and more efficient control for high-precision motion control systems. Furthermore, the RA can be made from ferromagnetic materials, which are widely used in the production of transformers, circuit breakers, and electrical motors, and are readily available commercially at low prices. RA is currently only used in a few applications involving magnetic bearings and magnetic switches.