A New EDS (X-ray) detector for the Laser-Enabled Focused Ion Beam

能量色散X射线光谱法（EDS）是一种可靠的电子显微镜工具，用于元素鉴定和化学制图。该设备可用于不同领域的研究，包括混凝土和钢的工程结构材料，设计半导体芯片和封装的电子系统，开发下一代材料表征工具，模拟传热和流体流动的凝固过程，汽车轻量化，以及表征Inconel 625等增材制造合金，锌离子电池中的锌阳极性能，高强度低合金钢的氢脆、奥氏体Fe-Cr-Ni合金在热水和加压水（生物质的水热液化）和熔融氯化物盐混合物（小型模块化反应堆）中的腐蚀和应力腐蚀开裂。结合聚焦离子束（FIB）显微镜中的毫米级激光加工，它还可以实现基于3D连续切片的断层扫描，这非常关键地密封了与其他实验室技术的采样间隙，并牢固地建立了完整的多尺度3D相关成像和表征流程。它还将作为完整低温工作流程仪器上唯一的EDS探测器，安装在激光光纤上，能够在冷冻温度下进行表征，是软材料和电池的理想选择。所要求的EDS是最新一代的大传感器尺寸硅漂移探测器（SSD），可形成宽的收集立体角，用于快速识别感兴趣区域的元素，并在3D EDS断层扫描中进行有效的化学绘图。该探测器将设在加拿大电子显微镜中心设施内并得到良好维护，可广泛用于研究项目、HQP培训和工业服务。这一EDS系统将为加拿大研究人员和工业界提供一个宝贵的工具，在国际竞争力方面领先一步。

Energy-dispersive X-ray spectrometry (EDS) is a reliable electron microscopy tool for elemental identification and chemical mapping. This equipment enables research in diverse areas that include engineering structural materials of concrete and steels, designing electronic systems of semiconductor chips and packaging, developing next-generation materials characterization tools, modelling solidification process of heat transfer and fluid flow, automotive lightweighting, and characterizing additive manufactured alloys like Inconel 625, Zn anode performance in Zn ion batteries, hydrogen embrittlement of high strength low alloy steel, corrosion and stress corrosion cracking of austenitic Fe-Cr-Ni alloys in hot, and pressurized water (hydrothermal liquefaction of biomass) and molten chloride salt mixtures (small modular reactors). In combined with the laser machining at millimeter scale in a Focused ion beam (FIB) microscope, it also enables 3D serial-sectioning based tomography which crucially seals the sampling gap from other laboratory techniques and firmly establishes a full multi-scale 3D correlative imaging and characterization flow. It will also act as the only EDS detector on the full cryo-workflow instrument, to be installed on the laser-fib, enabling characterization at frozen temperatures, ideal for soft materials and batteries. The requested EDS is a latest-generation Silicon Drift Detector (SSD) of large sensor size that forms wide solid angle of collection for quick elemental identification of regions of interest and efficient chemical mapping within 3D EDS tomography. This detector is going to be located and well maintained at the Canadian Centre for Electron Microscopy (CCEM) facility, accessible widely for research projects, HQP training and industrial service. This EDS system will give Canadian researchers and industrials a valuable tool a step ahead in international competitiveness.