Two-Dimensional Guided Wave Spatial Light Controller Based on SIMOX Processing and Germanium-Silicon Alloys

基于SIMOX工艺和锗硅合金的二维导波空间光控制器

• 批准号: 9200540
• 负责人: Fereydoon Namavar
• 金额: $ 24.98万
• 依托单位: Spire Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-10-15 至 1995-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9200540&HistoricalAwards=false
• 关键词: Two; Dimensional; Guided; Wave; Spatial

In Phase I both total optical isolation and efficient guide to guide coupling were accomplished for the first time in silicon. Based upon these achievements, parallel arrays of electronically phase-modulated waveguide structures will be fabricated in Phase II, configured to spatially dissect an incident coherent planar waveform, and used to rotate the output light-beam through constructive interference effects in the far field. A two dimensional array of phase-control channels would allow scanning the beam over the entire image plane. Initial efforts will be focused on fabrication and testing of a one dimensional, horizontal array of rigid waveguides placed over a single buried SiO2 layer; this device has potential as an Optical Spectrum Analyzer for de-multiplexing sets of nominally 1.3 um laser signals running simultaneously in a single fiber communication system. Later, a double buried SIMOX structure with two silicon cores will be constructed to demonstrate the highly novel concept of vertical beam steering. Integration of the two sets of guides into a two dimensional structure will allow rapid agile steering in both directions.

在第一阶段，完全光隔离和高效 引导到引导耦合完成了 第一次在硅。 基于这些 成就，电子平行阵列 相位调制波导结构将 在第二阶段制造，配置为在空间上 剖析入射相干平面波形，以及 用于旋转输出光束通过 远场的相长干涉效应。 一 二维相控通道阵列 将允许在整个区域上扫描光束 图像平面 初期工作将侧重于 制造和测试一维， 刚性波导的水平阵列放置在 单埋SiO2层;该器件具有作为 用于解复用的光谱分析仪 标称1.3 μ m激光信号组运行 同时在单光纤通信中 系统 后来，双埋SIMOX结构 两个硅芯将被构造成 展示了高度新颖的垂直概念， 波束控制 两套指南的整合 变成二维结构， 在两个方向上灵活地转向。