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Efficient Sources of Soft X-Ray Radiation Based on Fast Capillary Discharges

Efficient Sources of Soft X-Ray Radiation Based on Fast Capillary Discharges
基于快速毛细管放电的高效软 X 射线辐射源
批准号:
9401952
负责人:
Jorge Rocca
金额:
$30.31万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1994
资助国家:
美国
项目状态:
已结题
起止时间:
1994-09-15 至 1997-12-31

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英文摘要
9401952 Rocca There is significant interest in the development of compact and efficient sources of coherent and incoherent x-ray radiation for existing and emerging applications. Our previous research has studied the generation of highly ionized plasma columns of =200um diameter with electron temperatures of a few hundred eV and good stability utilizing currents that are 1 to 2 order of magnitude lower than those commonly used to create hot plasmas in large pulsed power generators. Building on these recent results, which include the observation of emission from the 3p-3s laser candidate transitions in neon-like Ca in a 40kA discharge, we propose to advance on the search for soft x-ray amplification in the plasma of fast capillary discharges. The proposed research also includes the study of the conversion efficiency of the electrical stored energy into incoherent x-rays to explore the feasibility of developing an efficient incoherent x-ray source. ***
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PFI-TT: Enhancing the Mass Production of Advanced Integrated Circuits
  • 批准号:
    2141227
  • 项目类别:
    Standard Grant
  • 资助金额:
    $25.0万
  • 财政年份:
    2022
  • 负责人:
    Jorge Rocca
  • 依托单位:
REU Site: Engineering Applications of Extreme Ultra-Violet (EUV) Laser Light
  • 批准号:
    1852537
  • 项目类别:
    Standard Grant
  • 资助金额:
    $37.13万
  • 财政年份:
    2019
  • 负责人:
    Jorge Rocca
  • 依托单位:
PFI:AIR - TT: Pulse Shaping for Increased Conversion Efficiency in Extreme Ultraviolet Lithography Sources for the Fabrication of Next Generation Integrated Circuits
  • 批准号:
    1701238
  • 项目类别:
    Standard Grant
  • 资助金额:
    $19.99万
  • 财政年份:
    2017
  • 负责人:
    Jorge Rocca
  • 依托单位:
REU Site: Engineering Applications of Extreme Ultra-Violet (EUV) Laser Light
  • 批准号:
    1461231
  • 项目类别:
    Standard Grant
  • 资助金额:
    $33.56万
  • 财政年份:
    2015
  • 负责人:
    Jorge Rocca
  • 依托单位:
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