REU Site: Engineering Applications of Extreme Ultra-Violet (EUV) Laser Light

该项目的广泛意义：极端紫外线工程研究中心是由科罗拉多州立大学、科罗拉多州立大学博尔德分校、加州大学伯克利分校(加州大学伯克利分校)和20家附属公司合作建立的，将通过国家科学基金会[工程教育部EEC-1461231]提供的为期3年的本科生研究经历资助，为来自美国各地高校的30名本科生提供暑期研究实习机会。被录取的学生将在3个校区中的一个参加为期10周的项目，包括开展尖端工程项目的研究，参加科学研讨会和行业参观，并展示他们的成果。该中心认识到学生在学术研究中能够互动和欣赏工业文化的重要性。因此，这笔赠款的一个目标是利用这些合作伙伴关系，使REU的校友实习生能够进入行业实习。该中心还与为少数群体服务的机构建立了积极的伙伴关系，并致力于为代表不足的少数群体的学生提供机会。该中心将通过与莫尔豪斯学院的威利·罗克伍德教授合作，扩大参与范围，莫尔豪斯学院是历史上的黑人学院/大学。(HBCU)，他与该中心合作已有10年的历史，是这一授权的联合PI。项目描述：光谱的EUV区域(波长约为5-50 nm)中的光是对半导体行业和国民经济至关重要的关键使能技术。EUV ERC将提供暑期研究实习机会，涉及EUV科学和技术主题，如激光系统、纳米科学(量子点)、电子(印刷电路板)电路设计、光子技术(椭圆偏振测量、相移干涉测量以及环境条件和低温真空光谱分析)、光学设计(布鲁斯特的角板分束器)、光刻(对下一代计算机处理器制造至关重要)、化学与材料科学(光刻胶)以及高压系统。可能开展的项目包括：利用极紫外激光烧蚀质谱仪进行纳米级分辨率质量显微镜；利用高次谐波极紫外光进行光电子动力学；以及设计和建造一种新型真空室试验台，用于在纳米级以超快时间分辨率表征磁性材料。该中心与工业公司在开发EUV方面建立了积极的合作伙伴关系，这些技术源于该中心进行的研究。该中心认识到学生在学术研究中能够互动和欣赏工业文化的重要性。因此，这笔赠款的一个目标是利用这些合作伙伴关系，使REU的校友实习生能够进入行业实习。

BROADER SIGNIFICANCE OF THE PROJECT:The Extreme Ultraviolet Engineering Research Center (EUV ERC), a partnership between Colorado State University (CSU), the University of Colorado, Boulder (CU Boulder), the University of California, Berkeley (UC Berkeley) and 20 corporate affiliates, will provide summer research internships to 30 undergraduate students from colleges and universities across the United States through a 3-year Research Experience for Undergraduates (REU) grant from the National Science Foundation (NSF) [Division of Engineering Education EEC-1461231]. Students who are accepted into the program will participate at one of the 3 campuses in a 10-week program that involves conducting research in a cutting-edge engineering project, attending scientific seminars and industry tours, and presenting their results. The Center recognizes the importance of students in academic research to be able to interact and appreciate the industrial culture. As a result, a goal of this grant is to leverage these partnerships to enable alumni REU interns to be placed into industry internships. The Center also has active partnerships with minority serving institutions and is committed to providing opportunities for students from underrepresented minority groups. The Center will broaden participation by joining efforts with, Professor Willie Rockwood of Morehouse College, a Historically Black College/Univ. (HBCU), who has a 10 year history of working with the Center and is co-PI of this grant.PROJECT DESCRIPTION:Light in the EUV region of the spectrum (wavelengths approximately 5 - 50 nm) is the key enabling technology of critical importance to the semiconductor industry and national economy. The EUV ERC will provide summer research internships that involve EUV science and technology topics such as laser systems, nanoscience (quantum dots), electronic (printed board) circuit design, photonic techniques (ellipsometry, phase shifting interferometry and both ambient condition and low-temperature vacuum spectroscopy), optics design (Brewster's Angle plate beam splitter), lithography (essential to next generation computer processor manufacturing), chemistry and material science (photo resists), and high voltage systems. Titles of possible projects include: Nanoscale resolution mass-microscope by EUV laser ablation mass spectrometry; Photoelectron dynamics using high harmonic EUV light; and, the Design and construction of a new vacuum chamber test bed for characterizing magnetic materials at the nano-scale with ultrafast time resolution. The Center has an active partnership with Industries in the development of EUV-technologies that derive from research conducted at the Center. The Center recognizes the importance of students in academic research to be able to interact and appreciate the industrial culture. As a result, a goal of this grant is to leverage these partnerships to enable alumni REU interns to be placed into industry internships.