A Novel Process for Reactive Laser Machining of Chemical Vapor-Deposited Diamond Ceramic
A Novel Process for Reactive Laser Machining of Chemical Vapor-Deposited Diamond Ceramic
批准号:
9634856
负责人:
Ajay Malshe
金额:
$22.56万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1997
资助国家:
美国
项目状态:
已结题
起止时间:
1997-08-15 至 2000-07-31
中文摘要
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英文摘要
Laser-induced machining is an excellent alternative to ion beams with distinct benefits including patterning by direct writing or optical projection without contact masks, higher etch rates, and enhanced surface integrity. This project investigates a substitution of ion beam with an electron beam or a laser beam. This research project will develop a fundamental understanding of laser-assisted and liquid-induced reactive machining technique by (1) performing nanosecond (ns)-laser chemical vapor-deposited(CVD)-diamond polishing and drilling experiments in various liquid media, and (2) by experimental diagnosis and theoretical modeling of laser : diamond interaction in liquid media.
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