Diffusion Studies and Defect Spectroscopy with Isotopically Controlled Semiconductors

同位素控制半导体的扩散研究和缺陷光谱学

• 批准号: 9732707
• 负责人: Eugene Haller
• 金额: $ 24万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-09-01 至 2002-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9732707&HistoricalAwards=false
• 关键词: Diffusion; Studies; Defect; Spectroscopy; Isotopically

9732707 Haller This condensed matter physics project uses separated isotopes to investigate self-diffusion under equilibrium and non-equilibrium conditions. In addition, local vibrational mode spectroscopy will be used to investigate low atomic mass impurities. The self-diffusion constants of (a) gallium in aluminum-gallium-arsenic heterostructures, (b) silicon in silicon epilayers, and (c) gallium and antimony in gallium antimonide heterostructures will be derived from secondary ion mass spectroscopy profiles. The temperature, alloy composition and doping dependencies of the diffusion constants will be investigated. These data are critical for the basic understanding of fundamental mass transport in solids and for development of a comprehensive model of diffusion in semiconductors. Future device processing models are expected to profit directly from these quantitative results. The vibrational mode spectroscopy experiments are designed to provide information about defect structures, lattice dynamics and atomic arrangements at defect sites in semiconductors. The work provides a valuable arena for training graduate students in both advanced technology and fundamental physics. %%% This condensed matter physics project uses separated isotopes to investigate self-diffusion under equilibrium and non-equilibrium conditions. In addition, local vibrational mode spectroscopy will be used to investigate low atomic mass impurities. The self-diffusion constants of (1) gallium in aluminum-gallium-arsenic heterostructures, (2) silicon in silicon epilayers, and (3) gallium and antimony in gallium antimonide heterostructures will be derived from secondary ion mass spectroscopy profiles. The temperature, alloy composition and doping dependencies of the diffusion constants will be investigated. These data are critical for the basic understanding of fundamental mass transport in solids and for development of a comprehensive model of diffusion in semiconductors. Future device processing models are expected to profit directly from these quantitative results. The vibrational mode spectroscopy experiments are designed to provide information about defect structures, lattice dynamics and atomic arrangements at defect sites in semiconductors. The work provides a valuable arena for training graduate students in both advanced technology and fundamental physics. ***

小行星9732707 这个凝聚态物理项目使用分离的同位素来研究平衡和非平衡条件下的自扩散。此外，局域振动模式光谱将用于研究低原子质量杂质。（a）铝-镓-砷异质结构中的镓，（B）硅外延层中的硅，以及（c）锑化镓异质结构中的镓和锑的自扩散常数将从二次离子质谱分布导出。温度，合金成分和掺杂的扩散常数的依赖关系将进行研究。 这些数据对于基本理解固体中的基本质量输运和发展半导体中扩散的综合模型至关重要。未来的器件处理模型有望直接从这些定量结果中获益。振动模光谱实验旨在提供有关半导体中缺陷结构、晶格动力学和缺陷处原子排列的信息。这项工作为培养先进技术和基础物理学研究生提供了一个宝贵的竞技场。 这个凝聚态物理项目使用分离的同位素来研究平衡和非平衡条件下的自扩散。此外，局域振动模式光谱将用于研究低原子质量杂质。（1）铝-镓-砷异质结构中的镓，（2）硅外延层中的硅，以及（3）锑化镓异质结构中的镓和锑的自扩散常数将从二次离子质谱图导出。温度，合金成分和掺杂的扩散常数的依赖关系将进行研究。 这些数据对于基本理解固体中的基本质量输运和发展半导体中扩散的综合模型至关重要。未来的器件处理模型有望直接从这些定量结果中获益。振动模光谱实验旨在提供有关半导体中缺陷结构、晶格动力学和缺陷处原子排列的信息。这项工作为培养先进技术和基础物理学研究生提供了一个宝贵的竞技场。 ***