Fundamental Implantation, Epitaxy and Defect studies in Silicon to support ultra-shallow junction formation

点击翻译按钮获取中文摘要

If successful this project will provide key data and understanding that are fundamentally important for semiconductor science and technologically essential for the global semiconductor industry. Hence successful outcomes will benefit the Nation by raising the international profile of Australian science in these areas. More direct benefit will be derived from the two Australian ventures that require successful implementation of ultra-shallow junction formation. One is the new silicon phase-change memory company, WRiota, that requires ultra-shallow silicon layers. The second is the quantum computing initiatives in silicon, where understanding of defect-mediated processes in shallow implanted layers is essential to the technology.