EAGER: Quantum Manufacturing: Three-Dimensional Printing of Meta-Photonic Elements for Chip-based Quantum Devices

这项探索性研究（EAGER）量子制造奖的早期概念补助金将支持为制造基于光的小型化量子器件产生科学知识的研究。量子效应在计算、传感和通信方面的极大性能增强，有可能改变各个领域的科学和技术。虽然这些效应中的许多已经在研究实验室中得到了证明，但实际的低成本量子器件并没有广泛使用。一个主要的限制是需要笨重的光学元件来操纵这些设备中的光。通过纳米级结构使这些光学元件小型化是可能的，但是这种结构既不能快速制造，也不能具有广泛操纵光所需的各种形状。该奖项支持基础研究，以产生快速打印各种形状的精细纳米级结构所需的知识，并将这些结构转化为功能性光学器件。小型化光学可以将量子设备从昂贵而笨重的桌面系统转变为负担得起的小型掌上设备。因此，这项工作可以使量子技术广泛使用，从而改善国家安全，提高美国的经济竞争力，提高生活质量。通过在新兴的量子制造领域培训来自不同背景的学生，该项目将有助于培养一支具有全球竞争力和多样化的STEM劳动力队伍。基于投影双光子光刻技术的纳米级3D打印可以在100纳米尺度上打印聚合体像素（即体素）用于元光子，但这些体素在形状上受到限制，并且不具有期望的光学特性。控制体素的大小和形状对于实现所需的光学功能至关重要，但实现所需几何形状的工艺参数组合是未知的。此外，将3D聚合物结构转换为光学材料的模式转移技术的知识有限，因为大多数技术都是针对2D结构进行优化的。该项目将填补这些知识空白，并生成一套元光子学设计规则和构建模块，以最佳方式利用功能并避免制造方法的限制。这些目标将通过结合经验研究和基于物理的印刷和图案转移过程建模，以及通过元光子器件的设计、制造和测试来实现。这项工作将为设计和制造元光子器件提供必要的路线图的第一步，可以使用该方法实现量子应用的波前工程，类似于基于铸造厂的制造工艺的工艺设计套件。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

This EArly-concept Grant for Exploratory Research (EAGER) Quantum Manufacturing award will support research to generate scientific knowledge for the manufacturing of light-based miniaturized quantum devices. The extreme performance enhancements in computing, sensing, and communications that are enabled by quantum effects have the potential to transform both science and technology in various fields. Although many of these effects have already been demonstrated in research laboratories, practical low-cost quantum devices are not widely available. A major limitation is the need for bulky optical components to manipulate light within these devices. It is possible to miniaturize these optical components through nanoscale structures, but such structures can neither be fabricated rapidly nor in the variety of shapes required for extensive manipulation of light. This award supports fundamental research to generate the knowledge required to rapidly print fine nanoscale structures of various shapes and to convert these structures into functional optical devices. Miniaturized optics can transform quantum devices from expensive and bulky table-top systems into affordable and small palm-top devices. This work can therefore make quantum technology widely accessible and thereby improve national security, increase U.S. economic competitiveness, and enhance the quality of life. By training students from different backgrounds in the emerging area of quantum manufacturing, this project will help develop a globally competitive and diverse STEM workforce. Nanoscale 3D printing based on projection two-photon lithography can print polymeric volumetric pixels (i.e., voxels) on the 100 nm scale for meta-photonics but these voxels are limited in shape and do not have the desired optical properties. Controlling the size and shape of the voxels is critical to achieving the desired optical function, but the process parameter combinations for achieving the desired geometries are unknown. Additionally, there is limited knowledge on pattern transfer techniques for converting 3D polymeric structures into optical materials as most techniques are optimized for 2D structures. This project will fill these knowledge gaps and generate a set of meta-photonics design rules and building blocks that optimally leverage the capabilities and avoid the limitations of the manufacturing approach. The objectives will be achieved through a combination of empirical studies and physics-based modeling of the printing and pattern-transfer processes as well as through meta-photonic device design, fabrication, and testing. This effort will provide the initial step for the necessary roadmap for the design and manufacturing of the meta-photonic devices that can enable wavefront engineering for quantum applications using the approach, similar to the process design kits of the foundry-based fabrication processes.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.