NER: Ultrafast Laser-Assisted Scanning Probe Fabrication of Nanostructues

通过超快脉冲激光辐射与近场扫描探针显微镜相结合，对纳米级表面工程进行了基础探索性研究。一个新的实验装置，包括一个飞秒激光源耦合扫描AFM/STM系统用于此目的。根据工艺参数，可以实现高清晰度的纳米加工和纳米沉积。的激光强度分布，波长和偏振的影响进行检查有关的样品/探针针尖材料参数。所产生的纳米特征的完整性、耐久性、机械、化学和电结构特性通过各种微分析技术来表征。长期目标是开发关键工艺参数、图案化特征和改性表面的材料特性之间的函数关系，从而实现纳米结构优化。

Basic exploratory research is performed on nanoscale surface engineering through means of ultra-fast, pulsed laser radiation coupled with near-field scanning probe microscopy. A new experimental apparatus consisting of a femtosecond laser source coupled with a scanning AFM/STM system is used for this purpose. Depending on the process parameters, high-definition nanomachining and nanodeposition can be achieved. The effects of the laser intensity distribution, wavelength, and polarization are examined in relation to the sample/probe tip material parameters. The integrity, durability, mechanical, chemical and electrical structural properties of the produced nanofeatures are characterized by various micro-analytical techniques. The long-term objective is the development of functional relationships between key process parameters, patterning features, and material properties of the modified surfaces that will enable nanostructure optimization.