NER: Nanoscale Laser-assisted Deposition and Crystal Growth

该项目是对纳米科学和工程倡议NSF 01-157，NER类的响应。将对激光化学气相沉积(LCVD)纳米结构进行探索性研究。将利用近场扫描光学探头(NSOM)进行实验，以便将激光照射的影响限制在几十纳米的横向尺寸内。这项研究的主要目标是通过NSOM-LCVD工艺在特定位置完成纳米特征的沉积和写入。不同的沉积/衬底系统将被研究。这种方法将导致可控的晶体生长和三维复杂纳米结构的制造。将深入了解纳米级沉积、成核和晶体生长过程中复杂的热化学物理现象的基本机制。表面纳米特征的制备在关键的新兴技术领域有许多重要的应用，包括制造纳米电光机械集成电路。这项研究的目标是开发具有定制织构、光学和机电性能的纳米结构表面的新工艺。这些工艺将在功能纳米器件的制造和异质集成中普遍使用。加州大学伯克利分校的几个现有项目将被用来扩大教育和外联研究的影响，并利用这些项目来确定、招聘和吸引来自代表性不足群体和少数族裔的研究生研究人员。预计这项研究将成为博士论文的主要部分，而本科生也将作为实验室助理参与这项研究。在这个项目中开发的研究结果、程序和专门知识将通过课程作业和研讨会(包括新生研讨会)传达给研究生和本科生。

This project was received in response to the Nanoscale Science and Engineering initiative NSF 01-157, category NER. Exploratory research will be conducted on the laser chemical vapor deposition (LCVD) of nanostructures. Experiments will be carried out utilizing near filed scanning optical probes (NSOMs) in order to confine the effects of the laser irradiation to lateral dimensions of only a few tens of nanometers. The main objective of the research is to accomplish deposition and writing of nanofeatures at specified locations via NSOM-LCVD processes. Different deposition/substrate systems will be investigated. This approach will lead to controlled crystal growth and fabrication of complex nanostructures in three dimensions. Insight will be gained on the fundamental mechanisms of the complex thermo-chemo-physical phenomena during the nanoscale deposition, nucleation and crystal growth processes. The production of surface nanofeatures has many important applications in critical emerging technology fields, including the fabrication of nano-electro-photo-mechanical integrated circuits. The goal of the research is to develop novel processes for nanostructuring surfaces with tailor-made texture, optical and electromechanical properties. These processes will be of ubiquitous use in the fabrication and heterogeneous integration of functional nanoscale devices. Several existing programs at UC Berkeley will be leveraged in order to broaden the impact of the research on education and outreach and utilized to identify, recruit and attract graduate student researchers from underrepresented groups and minorities. It is expected that the research will form a major part of a doctoral dissertation, while undergraduate students will also participate in the research as laboratory assistants. The research results, procedures and expertise developed in this project will be communicated to both graduate and undergraduate students through coursework and seminars (including a freshman seminar).