NER: Role of Elastic Anisotropy in Semiconductor Nanopatterning

NER：弹性各向异性在半导体纳米图案化中的作用

• 批准号: 0210714
• 负责人: Rachel Goldman
• 金额: $ 10万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-07-15 至 2005-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0210714&HistoricalAwards=false
• 关键词: NER; Role; Elastic; Anisotropy; Semiconductor

This Nanoscale Exploratory Research (NER) proposal was submitted in response to the solicitation "Nanoscale Science and Engineering" (NSF 01-157). The project will explore the role of elastic anisotropy in the self-patterning of semiconductor nanostructures, possibly catalyzing a new class of high performance nanostructure devices. The project aims to venture into an emerging concept in nanoscale science and engineering using a fundamentally new and interdisciplinary approach, which combines the complementary expertise of the investigators. During the exploratory phase, the role of elastic anisotropy in three-dimensional semiconductor nanopatterning will be established. To this end, ternary alloy films with varying alloy composition, lattice misfit, and thickness will be grown by molecular beam epitaxy; their elastic anisotropies will be measured using Brillouin scattering and interpreted using atomic-scale simulations. Using these alloy films as the spacer material in quantum dot superlattices, the relationship between the elastic anisotropies and the long-range order of the resulting quantum dot arrays will then be established. The work accomplished in this NER project may lay the foundation for a larger effort to develop three-dimensional nanopatterning methods for use in a wide variety of innovative nanostructure devices.%%% The project addresses basic exploratory research issues in a topical area of materials science with high technological relevance. An important feature of the program is the integration of research and education through the training of students in a fundamentally and technologically significant area. Graduate, undergraduate, and high school students will participate in this project, and will be involved with growth and characterization of semiconductor nanostructures, elastic property measurements, and computer simulations. ***

这个纳米探索性研究（NER）提案是响应“纳米科学与工程”（NSF 01-157）的征集而提交的。该项目将探索弹性各向异性在半导体纳米结构自图案化中的作用，可能催化一类新的高性能纳米结构器件。该项目旨在利用一种全新的跨学科方法，结合研究人员的互补专业知识，探索纳米科学和工程领域的一个新兴概念。在探索阶段，弹性各向异性在三维半导体纳米图案化中的作用将被建立。为此，三元合金薄膜与不同的合金成分，晶格失配，和厚度将通过分子束外延生长，其弹性各向异性将使用布里渊散射测量和解释使用原子尺度的模拟。使用这些合金薄膜作为量子点超晶格中的间隔材料，然后将建立弹性各向异性和所得到的量子点阵列的长程有序之间的关系。该NER项目中完成的工作可能为更大规模地开发用于各种创新纳米结构设备的三维纳米图案化方法奠定基础。%该项目涉及具有高技术相关性的材料科学专题领域的基本探索性研究问题。该计划的一个重要特点是通过在一个基本和技术上重要的领域对学生进行培训来整合研究和教育。研究生、本科生和高中生将参与该项目，并将参与半导体纳米结构的生长和表征、弹性性能测量和计算机模拟。***