US-France Cooperative Research: Development of a Reliable Solid Precursor Delivery System

0233328 Gladfelter这个为期两年的美法化学合作奖涉及明尼苏达大学和国立化学艺术工程学院的研究人员和学生。 美国的韦恩·格拉德费尔特和法国的康斯坦丁·瓦拉斯领导了这项合作。他们将研究化学气相沉积（CVD）工艺，包括金属有机化学气相沉积（MOCVD）。 它们在工业上广泛用于形成金属、半导体和半导体的薄膜。例如，光电子器件如激光器在MOCVD工艺中由三甲基镓和砷化氢生产。 最近试图通过设计新的前体来改进CVD工艺，但遇到了工艺问题。 随着前体的尺寸和复杂性增加，前体在标准温度和压力下固化。研究人员建议使用流化床技术来解决这个问题，并将设计和建造一个流化床固体输送系统，用于金属钼和二氧化锆薄膜的化学气相沉积。法国研究人员和他的团队是流化床技术的专家，最近使用流化床CVD用金属涂覆粉末。 美国研究小组在合成用于薄膜CVD的分子前体方面的经验对此进行了补充。 他们还完成了对沉积化学与薄膜成分和微观结构之间关系的研究。该奖项代表了美国方面向NSF和CNRS提出的平行建议。 NSF将为美国调查员及其学生支付旅费和生活费。CNRS将支持法国研究人员和学生访问美国。

0233328GladfelterThis two-year award for US-France collaboration in chemistry involves researchers and students at the University of Minnesota and the Ecole Nationale Superieure d'Ingenieurs en Arts Chimiques. Wayne Gladfelter in the US, and Constantin Vahlas in France lead this collaboration. They will investigate chemical vapor deposition (CVD) processes, including metal organic chemical vapor deposition (MOCVD). These are widely used in industry to form films of metals, semiconductors and dielectrics. For example, optoelectronic devices such as lasers are produced from trimethylgallium and arsine in an MOCVD process. Recent attempts to improve CVD processes by designing new precursors have encountered processing problems. As the size and complexity of the precursor increases, the precursor solidifies at standard temperature and pressure. The investigators propose to use fluidized-bed technology to solve this problem and will design and construct a fluidized-bed solid delivery systems for the chemical vapor deposition of metallic molybdenum and zirconium dioxide films. The French investigator and his team are expert in fluidized-bed technology and have recently used fluidized-bed CVD to coat powders with metals. This is complemented by the US research group's experience in synthesizing of molecular precursors for CVD of thin films. They also have completed investigations of the relationship between deposition chemistry and film composition and microstructure. This award represents the US side of parallel proposals to the NSF and the CNRS. NSF will cover travel funds and living expenses for the US investigator and his students. The CNRS will support visits by French researchers and students to the United States.