NIRT: Heterogeneous Integration of Nanowires for Chemical Sensor Arrays

NIRT：用于化学传感器阵列的纳米线异构集成

• 批准号: 0303981
• 负责人: Thomas Mallouk
• 金额: $ 120万
• 依托单位: Pennsylvania State Univ University Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-08-01 至 2008-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0303981&HistoricalAwards=false
• 关键词: NIRT; Heterogeneous; Integration; Nanowires; Chemical

Intellectual merit:"Electronic nose"chemical sensor arrays are used to detect trace analytesin complex mixtures,and are important for environmental,biomedical,process control,andsecurity-related applications.Scaling chemical sensors to nanometer dimensions will openunprecedented opportunities for implementation of electronic nose arrays in and-held devices,remote monitoring,robotics,medical diagnostics,sensor dust,and other novel applications.To do this,we must create low cost,low power,massively parallel arrays of chemically diversenanosensors and integrate them with on-chip data processing.The proposed project will bringtogether an interdisciplinary team from three institutions to work on the fundamental problemsconnected with this goal.The project combines the expertise of chemists in nanosensorsynthesis,physicists in materials and device characterization,electrical engineers inheterogeneous integration and test circuit design,and computer scientists in the design,fabrication,and testing of novel low-power circuit architectures.While this project focusesspecifically on nanosensor arrays,the problems it addresses are generic to the integration ofmany different kinds of functional nanoscale objects into silicon-based circuits.Our approach builds on an existing knowledge base of chemical sensor array platforms anddata analysis methods,to which our team brings some unique new materials and techniques.Mallouk and Semancik have developed a method for incorporating chemical sensor "stripes"intotemplate-grown metal nanowires.These nanowires connect the lithographic length scale (micronnanowire length)with the nanoscale (30-300 nm diameter and stripe length).The synthetictechnique allows the chemical nature of the sensory material to be quite diverse.We will focuson three different sensor platforms -chemoresistive metal oxides,intrinsically conductingpolymers,and conductive polymer composites -which should provide excellent orthogonality insensor arrays.The physical properties of the sensory materials and of the nanowires will bestudied using test structures devised by Evoy and Semancik,focusing in particular on the thermaland temporal signatures of the nanosensor response.The synthesis and physicalcharacterization of the nanosensors will be tightly coupled so that a molecular-levelunderstanding of signal transduction and scaling effects can guide the optimization of the sensors.Mayer and Evoy have developed an electrofluidic alignment technique for placing nanowires inlithographically defined circuits.This will be a powerful tool for parallel heterogeneousintegration of the nanosensors into large arrays.Issues of yield,device density,and testing/logiccircuit integration will be addressed through a combined approach of simulation and experiment,in collaboration with Irwin and Narayanan.Finally,Irwin,Narayanan,and Mayer will designand test a CMOS sensor processing fabric that efficiently controls the duty cycle of sensoroperation and processes the array response locally.Feedback between device/circuit testing andnanosensor synthesis and characterization will tie the whole project together.Broader impact:The NIRT team will apply its diverse scientific background in educationand outreach activities at the graduate,undergraduate,high school,and K-8 levels.The researchprogram has a strong element of mentoring of women,minorities,undergraduates,and high schoolstudents.It will also provide a cross-disciplinary experience for graduate students throughexchange with partner laboratories.In each summer of the program,NIRT faculty and studentswill team with Penn State Action Potential staff to develop a series of 5 th -8 th grade science campson different current topics.The unique aspect of these camps is that they bring elementary andmiddle school teachers together with students,so that teachers can use new curricular material ina practical environment.NSF funds will be used to support the participation of teachers frombeyond our local area,to increase the geographic and minority impact of the outreach program.

智力优点：“电子鼻“化学传感器阵列用于检测复杂混合物中的痕量分析物，并且在环境、生物医学、过程控制和安全相关应用中是重要的。将化学传感器缩放到纳米尺寸将为电子鼻阵列在手持设备、远程监控、机器人、医疗诊断、传感器灰尘和其他新颖应用中的实现打开前所未有的机会。要做到这一点，我们必须制造低成本、低功耗、高性能的传感器阵列。大规模并行阵列的化学分歧纳米传感器，并将它们与上，芯片数据处理。拟议的项目将汇集来自三个机构的跨学科团队，致力于解决与此相关的基本问题目标。该项目结合了纳米传感器合成方面的化学家，材料和器件特性方面的物理学家，异质集成和测试电路设计方面的电气工程师，以及设计，制造和测试新型低功耗电路架构的计算机科学家的专业知识。虽然该项目特别关注纳米传感器阵列，它所解决的问题对于将许多不同种类的功能纳米级物体集成到硅中是通用的-我们的方法建立在化学传感器阵列平台和数据分析方法的现有知识基础上，为此，我们的团队带来了一些独特的新材料和技术。Mallouk和Semancik开发了一种将化学传感器“条纹“融入模板的方法，生长的金属纳米线。这些纳米线连接光刻长度尺度（微米纳米线长度）与纳米级（30-300 nm直径和条纹长度）。合成技术允许传感材料的化学性质相当多样化。我们将关注三种不同的传感器平台-化学电阻金属氧化物，固有导电聚合物，和导电聚合物复合材料--它们应该在传感器阵列中提供优异的正交性。传感材料和纳米线的物理特性将使用由埃塞尔比和塞曼奇克设计的测试结构进行研究，特别关注纳米传感器响应的热特征和时间特征。纳米传感器的合成和物理表征将紧密耦合，以便分子-对信号传导和尺度效应的理解可以指导传感器的优化。Mayer和Ehrman已经开发了一种电流体对准技术，用于将纳米线放置在光刻定义的电路中。这将是一个强大的工具，纳米传感器到大阵列的异质集成。产量，器件密度和测试/逻辑电路集成的问题将通过与欧文和纳拉亚南合作的模拟和实验相结合的方法来解决。最后，欧文，纳拉亚南，Mayer将设计并测试一种CMOS传感器处理结构，该结构可以有效地控制传感器工作的占空比，并处理阵列响应本地。器件/电路测试和纳米传感器合成与表征之间的反馈将把整个项目联系在一起。更广泛的影响：NIRT团队将在研究生，本科生，高中和K-8级别的教育和推广活动中应用其多样化的科学背景。该研究计划具有指导女性，少数民族，本科生和高中生的强大元素。它还将通过与合作实验室的交流为研究生提供跨学科的经验。在该计划的每个夏天，NIRT的教师和学生将与宾州州立大学的行动潜力工作人员合作，针对不同的当前主题开发一系列5 - 8年级的科学夏令营。这些夏令营的独特之处在于，他们将小学和中学教师与学生聚集在一起，这样教师就可以在实际环境中使用新的课程材料。NSF的资金将用于支持我们当地以外的教师的参与，以增加外展计划的地理和少数民族影响。