MRI: Acquisition of a Dual Focued Ion/Electron Beam (FIB) Imaging and Nano-Fabrication Tool

MRI：获取双聚焦离子/电子束 (FIB) 成像和纳米制造工具

• 批准号: 0821008
• 负责人: David Paine
• 金额: $ 81万
• 依托单位: Brown University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-09-01 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0821008&HistoricalAwards=false
• 关键词: MRI; Acquisition; Dual; Focued; Ion

Technical AbstractThis MRI proposal by Brown University requests support for the acquisition of an FEI NOVA 600i Nanolab DualBeam SEM/FIB for nanoscale prototyping, machining, characterization and analysis of structures in the sub-100-nm regime. Research at Brown spanning engineering, physics, chemistry, geology, and medicine is focused on research that has, at its core, the manipulation and characterization of materials on the nanoscale. Some ongoing research that will make use of the new Dual Beam instrument includes: studies of high strain rate deformation of steel where nanoscale features of highly localized adiabatic shear bands (ASB) will be extracted for TEM analysis; creation of nanopore-based prototype device structures for biomolecule analysis that require the selective metallization of e-beam created pores; generation of initiation cracks in multiphase structural materials, in situ monitoring of crack propagation, and the reconstruction of the crack path by serial-sectioning and electron backscatter diffraction (EBSD); manipulation of nanoparticle arrays for patterned magnetic media applications; and minimally invasive, selective removal of inclusions for the identification of the origins of priceless archeological glass samples. More broadly, the selected instrument will provide Brown researchers with the ability to create, modify, and characterize complex structures on the nanoscale, e.g. to extract TEM samples from specific morphological features, to produce three-dimensional serial sections for EBSD analysis of microstructure, and to fabricate unique test structures for examining physical properties of nanomaterials. The growth in nano-materials research at Brown has strained the existing capacity of our Electron Microscope Central Facility (EMCF) and has exposed an urgent need for the capabilities that can only be provided by a Dual Beam FIB/SEM instrument. When added to the Brown EMCF user facility, this tool, the only one in Rhode Island, will be available to all researchers in the state and southeast New England. Non-Technical AbstractWith the acquisition of a new dual beam SEM/FIB, Brown University researchers will now be able to both see and manipulate nanomaterials in a way that will allow the creation of prototype nanomachines and structures on the nanoscale. In the last century, the electron microscope allowed actual photographic images to be formed of features in materials that are just a few atoms or molecules in size, and impossible to see by other means. Now, a new type of tool (the dual beam SEM/FIB) uses electron beams and focused ion beams to simultaneously see and touch on the nanoscale, allowing scientists to assemble new materials and devices with tailored mechanical, chemical, and/or optical properties. Researchers at Brown in Engineering, Physics, Chemistry, Geology, Biology, and Archeology will use the capabilities of the new dual beam SEM/FIB (the only one in Rhode Island) to create, modify, and characterize nanomaterials in a wide array of applications, including devices for the detection of DNA and other biomolecules, new magnetic storage devices, and design of stronger and lighter materials.

技术摘要布朗大学的这份MRI提案要求支持收购FEI NOVA 600 i Nanolab DualBeam SEM/FIB，用于纳米级原型制作、加工、表征和分析亚100 nm范围内的结构。 在布朗跨越工程，物理，化学，地质学和医学的研究集中在研究，在其核心，纳米材料的操纵和表征。 一些正在进行的研究，将利用新的双束仪器包括：研究高应变率变形的钢，其中高度局部化的绝热剪切带（ASB）的纳米级特征将被提取用于TEM分析;创建基于纳米孔的原型设备结构的生物分子分析，需要选择性金属化的电子束创建的孔;在多相结构材料中产生初始裂纹，原位监测裂纹扩展，以及通过连续切片和电子背散射衍射（EBSD）重建裂纹路径;和微创，选择性地去除夹杂物，以确定无价的考古玻璃样品的来源。更广泛地说，所选择的仪器将为布朗研究人员提供在纳米级上创建，修改和表征复杂结构的能力，例如从特定的形态特征中提取TEM样品，为微观结构的EBSD分析制作三维连续切片，以及制造独特的测试结构以检查纳米材料的物理特性。 在布朗纳米材料研究的增长已经紧张我们的电子显微镜中心设施（EMCF）的现有能力，并已暴露了对只能由双束FIB/SEM仪器提供的能力的迫切需求。 当添加到布朗EMCF用户设施，这个工具，唯一的一个在罗得岛，将提供给所有研究人员在该州和东南部新英格兰。 非技术摘要随着新的双光束SEM/FIB的获得，布朗大学的研究人员现在将能够看到和操纵纳米材料的方式，将允许在纳米尺度上创建原型纳米机器和结构。 在上个世纪，电子显微镜使只有几个原子或分子大小的材料特征形成了实际的摄影图像，而这些特征是用其他手段无法看到的。 现在，一种新型的工具（双束SEM/FIB）使用电子束和聚焦离子束同时在纳米尺度上观察和触摸，使科学家能够组装具有定制机械，化学和/或光学特性的新材料和设备。 布朗大学的工程、物理、化学、地质、生物和考古学研究人员将利用新的双光束SEM/FIB（罗得岛唯一一台）的功能，在广泛的应用中创建、修改和表征纳米材料，包括用于检测DNA和其他生物分子的设备、新的磁存储设备以及更强、更轻的材料设计。