PFI:AIR-TT: Technology Translation: Rolled-up 3D Passive Electronic Component Prototype Development

PFI:AIR-TT：技术翻译：卷式 3D 无源电子元件原型开发

• 批准号: 1701047
• 负责人: Xiuling Li
• 金额: $ 20万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-06-01 至 2020-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1701047&HistoricalAwards=false
• 关键词: PFI; AIR; TT; Technology; Translation

This PFI:AIR Technology Translation project focuses on translating the strain-induced self-roll-up membrane nanotechnology to fill the need to reduce the size of widely used lumped passive components in integrated circuits.   The miniaturization of passive electronic components is important because it will shrink the overall size and weight of wearable devices or allow more functionalities to be implemented without changing the footprint of the electronic components. The project will result in a prototype of an integrated circuit chip with rolled-up passive components, particularly an inductor. This rolled-up inductor has the following unique features: small, light, and high operating frequency. These features provide advantages including better wearability and higher frequency mobile communications when compared to the leading competing planar coil inductors and other passive components in this market space.  This project addresses the following technology gaps as it translates the strain-induced self-rolled-up membrane (S-RuM) based passive components from research discovery toward commercial application. The current widely used lumped passive components, especially planar inductors in monolithic integrated circuits (ICs) have several drawbacks that include large on-wafer footprint (occupy as much as 90% of the IC), low operation frequency, and sensitivity to substrate doping levels and deformation. One of the solutions to solve these problems is to use three-dimensional (3D) structures, because hierarchical 3D structures enable efficient use of materials without changing the footprint in plane and lead to advanced functionalities that are otherwise out of reach. However, if conventional fabrication technologies are used to produce 3D structures, issues such as mechanical stability, conformity, alignment, process complexity and cost are difficult to address. The S-RuM based passive technology provides a revolutionary platform because of the self-assembly nature, which produces a 3D cylindrical structure from a 2D layout spontaneously once released from the mechanical support, minimizing mechanical stability concerns by avoiding processing on suspended or curved surfaces. The CMOS-compatibility of the materials and processes also makes integration with active devices and other passive components feasible. In contrast to the planar counterpart, this 3D platform promises to produce IC chips with dramatically enhanced inductance density, superior Q factor/frequency, and minimized substrate coupling. Personnel involved in this project, including one graduate student and two undergraduate students, will receive innovation and technology translation experiences through making a functional prototype that meets the needs of potential customers.

这个PFI:AIR技术翻译项目的重点是翻译应变诱导的自卷膜纳米技术，以满足缩小集成电路中广泛使用的集总无源元件尺寸的需要。无源电子元件的小型化很重要，因为它将缩小可穿戴设备的整体尺寸和重量，或者在不改变电子元件占地面积的情况下实现更多功能。该项目将产生一个集成电路芯片的原型，其中包括卷起来的无源元件，特别是电感器。这种卷式电感具有以下特点：体积小、重量轻、工作频率高。与市场上领先的平面线圈电感器和其他无源元件相比，这些功能提供了更好的可穿戴性和更高频率的移动通信等优势。该项目解决了以下技术差距，因为它将应变诱导自卷起膜（S-RuM）为基础的无源元件从研究发现转向商业应用。目前广泛使用的集总无源元件，特别是单片集成电路（IC）中的平面电感器，具有几个缺点，包括晶圆上占地面积大（占据IC的90%），工作频率低，对衬底掺杂水平和变形敏感。解决这些问题的解决方案之一是使用三维（3D）结构，因为分层的3D结构可以有效地利用材料，而不会改变平面上的足迹，并导致无法实现的高级功能。然而，如果使用传统的制造技术来生产3D结构，则难以解决机械稳定性、一致性、对准性、工艺复杂性和成本等问题。基于S-RuM的被动技术提供了一个革命性的平台，因为它具有自组装的特性，一旦从机械支架上释放出来，它就会自发地从2D布局产生3D圆柱形结构，通过避免在悬浮或曲面上加工，最大限度地减少了机械稳定性问题。材料和工艺的cmos兼容性也使得与有源器件和其他无源元件的集成成为可能。与平面平台相比，该3D平台有望生产具有显著增强的电感密度、优越的Q因子/频率和最小化衬底耦合的IC芯片。参与该项目的人员，包括一名研究生和两名本科生，将通过制作满足潜在客户需求的功能原型，获得创新和技术翻译经验。

项目成果

Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

• DOI: 10.1126/sciadv.aay4508
• 发表时间: 2020-01-01
• 期刊: SCIENCE ADVANCES
• 影响因子: 13.6
• 作者: Huang, Wen;Yang, Zhendong;Li, Xiuling
• 通讯作者: Li, Xiuling

Effect of Perforation on the Thermal and Electrical Breakdown of Self‐Rolled‐Up Nanomembrane Structures

• DOI: 10.1002/admi.201901022
• 发表时间: 2019-09
• 期刊: Advanced Materials Interfaces
• 影响因子: 5.4
• 作者: J. Michaels;Derek Wood;Paul J. Froeter;Wen Huang;D. Sievers;Xiuling Li

Three-dimensional radio-frequency transformers based on a self-rolled-up membrane platform

• DOI: 10.1038/s41928-018-0073-5
• 发表时间: 2018-05-01
• 期刊: NATURE ELECTRONICS
• 影响因子: 34.3
• 作者: Huang, Wen;Zhou, Jingchao;Li, Xiuling
• 通讯作者: Li, Xiuling