Vacuum Scanning Microwave Microscopy for quantitative characterization of sub-10 nm and atto-Farad scale capacitors and memories

真空扫描微波显微镜，用于对亚 10 nm 和阿托法拉级电容器和存储器进行定量表征

• 批准号: 258650972
• 负责人: Professor Dr.-Ing. Sergej Fatikow
• 金额: --
• 依托单位: Institut dÉlectronique de Microélectronique et de Nanotechnologie (IEMN)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2014
• 资助国家: 德国
• 起止时间: 2013-12-31 至 2017-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/258650972?language=en
• 关键词: Vacuum; Scanning; Microwave; Microscopy; quantitative

As device scaling will continue below 20 nm and novel nanodevices already appear on the market, accurate characterization and detailed understanding of their electronic structure is essential, yet challenging. In particular, nanocapacitors and tunnel barriers, that are building blocks in most memories, are extremely difficult to characterize due to capacitances in the atto-Farad range. Recently developed Scanning Microwave Microscopes (SMMs) are almost showing such abilities but their operation, only limited to air or nitrogen environment, lead to difficult quantitative characterization due to well-known parasitic water meniscus contribution. Other Scanning Probe Microscopes (Atomic Force Microscopes, Kelvin Force Microscope, Scanning Tunneling Microscopes and other), have been proposed with vacuum or ultra-high vacuum versions to remove this parasitic effect, but also to protect sensitive devices.In this project, we propose to build, for the first time, a SMM under vacuum (VACSMM) that will combine nanoscale contact, imaging, SEM observation and FIB refining of AFM tips, reduced electrical parasitics, DC and RF measurements. It will be equipped with an interferometer allowing aF capacitance sensitivity. Sub-10 nm capacitors and memories will be fabricated with an on-chip calibration kit to achieve a quantitative electronic study on these devices. In particular, statistical studies will be performed on the capacitance, conductance and switching rates (for OxRAMs memories) and models/theory will be proposed (finite element modeling, analytical models for S parameters, physics of atomic switches).The fabricated VACSMM will coexist inside a SEM, automation methods will be developed as a perspective to make this apparatus a possible industrial tool for nanoscale capacitors and memory characterization before top electrode fabrication. This German-French joint project is a great opportunity to combine complementary expertise in nanodevices fabrication and SMM (French partner) and self-made Atomic Force Microscope/SEM under vacuum including software and robotic automation tools (German partner).

由于器件尺寸将继续缩小到20 nm以下，并且市场上已经出现了新型纳米器件，因此对其电子结构的准确表征和详细了解至关重要，但也具有挑战性。特别是，纳米电容器和隧道势垒，在大多数存储器中的构建块，是非常难以表征，由于在阿托法拉范围内的电容。最近开发的扫描微波显微镜（SMM）几乎显示出这样的能力，但它们的操作，仅限于空气或氮气环境，导致难以定量表征，由于众所周知的寄生水弯月面的贡献。其他扫描探针显微镜（原子力显微镜，开尔文力显微镜，扫描隧道显微镜和其他），已经提出了真空或超高真空版本，以消除这种寄生效应，但也保护敏感器件。在这个项目中，我们建议建立，第一次，真空下的SMM（VACSMM），将联合收割机纳米接触，成像，SEM观察和FIB原子力显微镜尖端的细化，降低了电寄生效应、DC和RF测量。它将配备一个干涉仪，允许aF电容灵敏度。亚10纳米电容器和存储器将与芯片上的校准工具包，以实现对这些设备的定量电子研究。特别是，将对电容、电导和开关速率进行统计研究（对于OxRAM存储器）和模型/理论将被提出（有限元建模、S参数的分析模型、原子开关的物理学）。所制造的VACSMM将共存于SEM内，自动化方法将作为一种观点，使该装置成为一种可能的工业工具，纳米电容器和存储器表征在顶部电极制造之前。这个德法联合项目是一个很好的机会，结合联合收割机在纳米器件制造和SMM（法国合作伙伴）和自制的真空原子力显微镜/SEM，包括软件和机器人自动化工具（德国合作伙伴）的互补专业知识。

项目成果

Modularized SPM-controller based on an FPGA for combined AFM and SMM measurements

• DOI: 10.1109/marss.2016.7561716
• 发表时间: 2016-07
• 期刊: 2016 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
• 作者: M. Wieghaus;Tobias Tiemerding;O. Haenssler;S. Fatikow

Memristor device characterization by scanning microwave microscopy

通过扫描微波显微镜表征忆阻器器件

• DOI: 10.1109/marss.2017.8016537
• 发表时间: 2017
• 期刊: 2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
• 作者: G. Sassine;N. Najjari;N. Defrance;O.C. Haenssler;D. Theron;F. Alibart;K. Haddadi
• 通讯作者: K. Haddadi

Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors

集成扫描电子、力和微波显微镜的多模态成像技术及其在研究微型电容器中的应用

• DOI: 10.1116/1.5006161
• 发表时间: 2018
• 期刊: Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
• 作者: O.C. Haenssler;D. Théron;S. Fatikow
• 通讯作者: S. Fatikow

Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy

• DOI: 10.1007/s12213-018-0108-z
• 发表时间: 2018-06
• 期刊: Journal of Micro-Bio Robotics
• 影响因子: 2.3
• 作者: O. Haenssler;M. F. Wieghaus-;A. Kostopoulos;G. Doundoulakis;E. Aperathitis;S. Fatikow;G. Kiriakidis

Manipulating and characterizing with nanorobotics: In-situ SEM technique for centimeter and millimeter waves

使用纳米机器人进行操作和表征：厘米波和毫米波的原位 SEM 技术

• DOI: 10.1109/irmmw-thz.2015.7327755
• 发表时间: 2015
• 期刊: 2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz)
• 作者: O.C. Haenssler;S. Fatikow
• 通讯作者: S. Fatikow