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Liquid Contact Probing inside the SEM

SEM 内的液体接触探测

基本信息

批准号：
381855500
负责人：
Professor Dr.-Ing. Sergej Fatikow
金额：
--
依托单位：
Abteilung Mikrorobotik und Regelungstechnik
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2017
资助国家：
德国
起止时间：
2016-12-31 至 2020-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/381855500?language=en
关键词：
Liquid Contact Probing inside SEM

项目摘要

Downscaling of electronic device dimensions is still an ongoing task and has been the basis of the semiconductor industry for years. Therefore, qualitative measurements with high resolution are indispensable and the enhancement of old and the invention of new techniques are necessary.In the last years, a lot of new techniques have been proposed for the local characterization of materials in nanotechnology. The mostly used characterization technique in this industry is on-wafer contact probing, which has been limited in its resolution to the micrometer scale.This proposal aims at bringing the contact probing to the nanometer dimension by using nanodroplets of liquid metal to establish an electrical contact between nanostructures and prober. Therefore, a fully automatable robotic probing station inside an SEM will be fabricated. Pick and place procedures with nanometer precision will be used for a new alignment process of the prober by establishing a liquid-solid-liquid interface with the alloy Ga-In-Sn as electrode. This will provide an easy and abrasion-free electrical contact to the device under test. The final part of this project will end in the fabrication of a prototype probe and a customized calibration kit, which exploit the liquid metal for nanometer RF contact probing.Furthermore, liquid metals will be thoroughly examined as functional materials for automated manipulations inside an SEM for electrical and mechanical applications in nanotechnology.

电子器件尺寸的缩小仍然是一项正在进行的任务，并且多年来一直是半导体工业的基础。因此，高分辨率的定性测量是必不可少的，旧技术的改进和新技术的发明是必要的。在过去的几年里，已经提出了许多新技术用于纳米技术中材料的局部表征。目前，该行业中最常用的表征技术是晶圆上接触式探针技术，其分辨率一直局限于微米级，本研究旨在利用液态金属的纳米液滴在纳米结构和探针之间建立电接触，将接触式探针技术提升到纳米级。因此，一个完全自动化的机器人探测站内的扫描电镜将制造。以Ga-In-Sn合金为电极，建立液-固-液界面，采用纳米级的拾取和放置工艺，实现了探针的对准。这将为被测器械提供简单且无磨损的电接触。该项目的最后一部分将完成一个原型探针和一个定制的校准工具包的制造，该工具包将利用液态金属进行纳米RF接触探测。此外，液态金属将作为功能材料进行彻底检查，用于在纳米技术中的电气和机械应用的SEM内进行自动操作。

项目成果

期刊论文数量（5）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Multi-target tracking for automated RF on-wafer probing based on template matching

DOI：
10.1109/marss.2019.8860983
发表时间：
2019-07
期刊：
2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
影响因子：
0
作者：
Hai Li;F. V. von Kleist-Retzow;O. Haenssler;S. Fatikow;Xianmin Zhang
通讯作者：
Hai Li;F. V. von Kleist-Retzow;O. Haenssler;S. Fatikow;Xianmin Zhang

Liquid Metal-Based Manipulator for Microscale Handling Inside SEM

DOI：
10.1109/nems.2019.8915588
发表时间：
2019-04
期刊：
2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
影响因子：
0
作者：
F. T. V. Kleist-Retzow;M. Bartenwerfer;S. Fatikow
通讯作者：
F. T. V. Kleist-Retzow;M. Bartenwerfer;S. Fatikow

Manipulation of Liquid Metal Inside an SEM by Taking Advantage of Electromigration