Local confined laser-induced plasmas for direct writing of low damage patterns by precise reactive etching

局部限制的激光诱导等离子体，通过精确的反应蚀刻直接写入低损伤图案

• 批准号: 392226212
• 负责人: Dr.-Ing. Klaus Zimmer
• 金额: --
• 依托单位: Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2018
• 资助国家: 德国
• 起止时间: 2017-12-31 至 2021-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/392226212?language=en
• 关键词: Local; confined; laser; induced; plasmas

With increasing integration and miniaturisation for extending the functionality of surfaces and thin films new materials are required but also new, innovative technologies for local modification, patterning and deposition are requested. Within the last years laser technologies have been developed to increase the precision of laser machining for enabling new applications. The current laser processing preferentially makes use of physical processes like laser-induced melting and evaporation and ablation. The goal of the proposed project is to investigate laser induced reactive plasmas (LIP) and evaluate them for micromachining of surfaces with an extremely high quality and a low defect density. The interaction mechanism between the LIP and surfaces can be of chemical or physical nature however typically physical interactions have been investigated until now. Hence, we focus on the generation of excited chemical reactive radicals by laser induced plasmas that should be employed for local chemical radical etching beneath the focal point of a particular shaped laser beam. Main questions to be answered cover the areas of (i) guiding of the pulsed, high intense laser light along the surface without surface damage and enabling near surface LIP formation at the same time, (ii) generation of reactive radicals from a gas mixture containing suitable precursor molecules by laser induced plasmas preferentially at atmospheric pressure, and (iii) transport of the LIP generated reactive species to and chemical reaction of them with the samples surface. By the results of the experimental work that should be accomplished by studying the surface modification and etching in dependence on LIP process parameters and investigating the formation, transport and decay of reactive products by preferentially optical in situ diagnostics are utilized to expose the involved processes and establish a mechanism of laser induced plasma etching. The simulation of selected processes should provide help for verifying the relevance of these processes and mechanism. Such laser induced reactive plasmas could enable locally resolved, chemical supported machining of surfaces for a variety of applications.

随着越来越多的集成和小型化以扩展表面和薄膜的功能，需要新材料，但还需要新的创新技术，用于局部修改，模式和沉积。在过去的几年中，已经开发了激光技术，以提高激光加工的精度以实现新应用。当前的激光处理优先利用了激光引起的熔融，蒸发和消融等物理过程。拟议项目的目的是研究激光诱导的反应性等离子体（LIP），并评估它们的微加工，以极高质量和低缺陷密度的表面进行微加工。嘴唇和表面之间的相互作用机制可以是化学或物理性质的，但是迄今为止，通常已经研究了物理相互作用。因此，我们专注于激光诱导的等离子体的激发化学反应性自由基的产生，该血浆应用于特定形状激光束的焦点以下的局部化学自由基蚀刻。要回答的主要问题涵盖了（i）指导脉冲，高强度激光沿表面损伤而没有表面损伤并同时启用近表面唇形成，（ii）从含有合适的前体分子的气体混合物中产生反应性的激光分子，通过激光诱导的等离子在大气中诱导的质量呈现出大气压力和（III）的反应和lip造成的反应，并产生了（III）的反应，并将其化学反应。通过研究表面修饰和蚀刻依赖唇部过程参数的表面修饰和蚀刻来完成的实验工作的结果，并通过优先使用光学的原位诊断来研究反应性产物的形成，运输和衰变，以暴露涉及的过程并建立激光诱导的等离子体的机制。所选过程的模拟应为验证这些过程和机制的相关性提供帮助。这种激光诱导的反应性等离子体可以使本地分辨的，化学支持的表面加工，用于各种应用。

项目成果

Ultrahigh Precision Machining of Polymer Surface using Laser-Induced Reactive Micro-Plasmas

使用激光诱导反应微等离子体对聚合物表面进行超高精度加工

• DOI: 10.2961/jlmn.2022.01.2005
• 发表时间: 2022
• 期刊: Journal of Laser Micro/Nanoengineering
• 作者: Leon Streisel;Martin Ehrhardt;Pierre Lorenz
• 通讯作者: Pierre Lorenz

Dry Etching of Germanium with Laser Induced Reactive Micro Plasma

激光诱导反应微等离子体干法蚀刻锗

• DOI: 10.1007/s40516-021-00147-1
• 发表时间: 2021
• 期刊: Lasers in Manufacturing and Materials Processing
• 作者: Martin Ehrhardt;Pierre Lorenz;Jens Bauer
• 通讯作者: Jens Bauer

Time- and Position-Dependent Breakdown Volume Calculations to Explain Experimentally Observed Femtosecond Laser-Induced Plasma Properties

• DOI: 10.1021/acsphotonics.2c00746
• 发表时间: 2023-02
• 期刊: ACS Photonics
• 影响因子: 7
• 作者: A. M. Hossain;M. Ehrhardt;Martin Rudolph;P. Lorenz;D. Kalanov;K. Zimmer;A. Anders

Dynamics and 2D temperature distribution of plasma obtained by femtosecond laser-induced breakdown

飞秒激光诱导击穿等离子体的动力学和二维温度分布

• DOI: 10.1088/1361-6463/ac42f8
• 发表时间: 2021
• 期刊: Journal of Physics D: Applied Physics
• 作者: Afaque M. Hossain;Martin Ehrhardt;Martin Rudolph
• 通讯作者: Martin Rudolph

Low surface damage laser processing of silicon by laser-induced plasma etching (LIPE)

• DOI: 10.1016/j.apsusc.2022.153712
• 发表时间: 2022-05
• 期刊: Applied Surface Science
• 影响因子: 6.7
• 作者: Heinke Robert;Ehrhardt Martin;Bauer Jens;Lotnyk Andriy;Lorenz Pierre;Morgenstern Roy;Lampke Thomas;Arnold Thomas;Zimmer Klaus