Analytical and Experimental Study on the Mechanical Strength Evaluation of Advanced Devices

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We developed several computer programs and an experimental technique for mechanical strength evaluation of advanced devices. The computer programs developed in the present research project are a program for fracture mechanics evaluation of interface between anisotropic bimaterial, a program for dislocation evaluation using a constitutive equation including microscopic information of materials such as dislocation density, and a molecular dynamics program for large scale problems. As an experimental technique, we developed systems for measuring strain distribution of small region with the use of images taken by an optical microscope or a scanning laser microscope. We performed mechanical strength studies for electronic devices using the analytical and experimental techniques developed in the present research project.