Joint Research on Micro Fluid Control System

集成了流量传感器、阀门、泵和流道的微流体控制系统需要用于不同的应用。硅微加工可以集成传感器和信号处理电路以及可批量生产一次性塑料微结构的微成型，可用于制造微流体控制系统的微模块。开发了用于化学分析系统的采样模块，该模块利用表面张力来控制样品溶液和化学试剂的混合。表面张力在这一体系中起着重要的作用。为了控制表面的疏水性，成功地开发了铁氟龙和镍的脉冲共电镀。研究了用于批量生产小体积血液分析用一次性塑料模组的微成型技术。微模具由东北大学的硅深反应离子蚀刻（RIE）或数控高速铣床制作，热压成型由合作伙伴德国弗里堡大学进行。此外，还开发了紫外光固化树脂微成型和紫外光透明硅橡胶模具。制备了微柱免疫反应芯片。通过在硅片上光刻合成不同DNA探针，研制出可用于低成本并行DNA诊断的DNA芯片。在此基础上，正在开发用于检测癌症启动子SNP的DNA芯片。制作了DNA芯片定位头。针对复杂半导体工艺中精细气体控制的需要，研制了集成式腐蚀性气体质量流量控制器。由于不锈钢和氮化铝对氟化物和氯化物等卤素气体的惰性，因此选用它们作为材料。

Micro fluid control systems which have integrated flow sensors, valves, pumps and flow channels are needed for different applications. Silicon micromachining which can integrate sensors and signal processing circuits and micro molding for mass production of disposable plastic microstructures can be used to fabricate micro modules for micro fluid control systems.Sampling module which uses surface tension for controlling the mixing of sample solution and reagent chemicals have been developed for chemical analyzing systems. Surface tension plays important roles in this system. To control hydrophobic properties of the surface, pulse co-electroplating of Teflon and nickel was successfully developed.Micro molding technology has been studied for the mass-production of disposable plastic module for analyzing small volume blood sample. Micro molds were fabricated by deep reactive ion etching (RIE) of silicon or using numerically controlled high speed milling machine in Tohoku University and the molding by hot embossing was carried out in Friburg University in Germany which is the collaborator in this project. In addition, micro molding using UV curable resin and UV transparent silicone rubber mold were developed. Immuno-reaction chip which has micro colume has been also fabricated.DNA chips which can be used for low cost parallel DNA diagnosis were developed by synthesizing different DNA probe photrolithographycally on a silicon chip. DNA chip for detecting SNP of cancer promoter is being developed based on the DNA chip. Spotting head for DNA chip was also fabricated.Integrated mass flow controller for corrosive gases was developed for fine gas control in sophisticated semiconductor processes. Stainless steel and aluminum nitride are used as the materials because of their inertness to halogen gasses as fluoride and chloride.