Joint Research on Micro Fluid Control System

微流体控制系统集成了流量传感器、阀门、泵和流道，可用于不同的应用场合。集成传感器和信号处理电路的硅微机械加工和用于批量生产一次性塑料微结构的微成型技术可用于微流体控制系统的微模块制造，利用表面张力控制样品溶液和试剂化学品混合的取样模块已被开发用于化学分析系统。表面张力在该体系中起重要作用。为了控制塑料表面的疏水性，成功地进行了聚四氟乙烯和镍的脉冲共电镀，并研究了微成型技术，用于批量生产一次性使用的小容量血液分析模块。在东北大学通过硅的深反应离子蚀刻（RIE）或使用数控高速铣床制造了微型模具，并在该项目的合作者德国的弗里堡大学进行了热压成型。此外，还开发了使用UV固化树脂的微成型和UV透明硅橡胶模具。通过在硅片上光刻合成不同的DNA探针，研制出可用于低成本并行DNA诊断的DNA芯片。基于该DNA芯片，正在开发用于检测癌症启动子SNP的DNA芯片。研制了腐蚀性气体集成质量流量控制器，用于精密半导体工艺中的气体控制。不锈钢和氮化铝被用作材料，因为它们对卤素气体如氟化物和氯化物惰性。

Micro fluid control systems which have integrated flow sensors, valves, pumps and flow channels are needed for different applications. Silicon micromachining which can integrate sensors and signal processing circuits and micro molding for mass production of disposable plastic microstructures can be used to fabricate micro modules for micro fluid control systems.Sampling module which uses surface tension for controlling the mixing of sample solution and reagent chemicals have been developed for chemical analyzing systems. Surface tension plays important roles in this system. To control hydrophobic properties of the surface, pulse co-electroplating of Teflon and nickel was successfully developed.Micro molding technology has been studied for the mass-production of disposable plastic module for analyzing small volume blood sample. Micro molds were fabricated by deep reactive ion etching (RIE) of silicon or using numerically controlled high speed milling machine in Tohoku University and the molding by hot embossing was carried out in Friburg University in Germany which is the collaborator in this project. In addition, micro molding using UV curable resin and UV transparent silicone rubber mold were developed. Immuno-reaction chip which has micro colume has been also fabricated.DNA chips which can be used for low cost parallel DNA diagnosis were developed by synthesizing different DNA probe photrolithographycally on a silicon chip. DNA chip for detecting SNP of cancer promoter is being developed based on the DNA chip. Spotting head for DNA chip was also fabricated.Integrated mass flow controller for corrosive gases was developed for fine gas control in sophisticated semiconductor processes. Stainless steel and aluminum nitride are used as the materials because of their inertness to halogen gasses as fluoride and chloride.