Flexible micro motion-systems having distributed actuators

对具有分布式驱动器的微动系统进行了研究。这些系统包括像蛇一样在血管中移动的主动导管，具有二维阵列致动器的触觉显示设备，以及像波纹管一样移动的静电致动器。本课题主要研究的是具有内、外管多关节结构的主动式导尿管。接头是形状记忆合金(SMA)线圈，通过电流加热收缩，连接单元沿6个方向移动。已经开发了几种类型的链节由硅或聚合物制成。还开发了用于主动导管的通信和控制集成电路以及微组装方法。通过在其中加入传感器，主动导管可以是多功能的。为了在导管末端应用先进的超声成像设备，开发了PZT1-3复合材料结构的微加工工艺。微机械加工的硅在陶瓷的烧结过程中被用作模具。还研制了小尺寸光纤压力传感器和由光波导布喇格光栅构成的分布式弯曲传感器。基于分布式驱动器的柔性运动系统项目已成功实施，并取得了预期的成果。

Micro motion-systems which have distributed actuators have been studied. These systems include active catheters which move like a snake in blood vessel, tactile display devices which has two-dimensional array actuators, and electrostatic actuators which move like bellows. The main subject of this project is the active catheters which have small multi-joint structures and inner and outer tubes. The joints are Shape Memory Alloy (SMA) coils which shrink by a current heating and the link-joint unit moves in 6 directions. Several types of which links are made of silicon or polymer have been developed. Integrated circuits for communication and control and micro-assembly method have been also developed for the active catheters. The active catheter can be multi-functional by incorporating sensors in it. For the purpose of advanced ultrasonic imaging devices at the end of catheter, microfabrication process for PZT 1-3 composite structures has been developed. Micromachined silicon is used as a mold during sintering of ceramics. Other sensors as small size optical fiber pressure sensors and distributed bending sensors which are made of optical wave guide and Bragg gratings have been also developed.The project on flexible motion systems using distributed actuators was successfully carried out and achievements have been obtained as planned.