Flexible micro motion-systems having distributed actuators

具有分布式执行器的灵活微运动系统

• 批准号: 07405006
• 负责人: ESASHI Masayoshi
• 金额: $ 23.42万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07405006/
• 关键词: Microactuator; Micromachine; Micromachining; Active catheter; Micro motion system; Flexible machine; Distributed machine; Three-dimensinal machining; マイクロマシ-ニング; 分布型機械; 能動力カテーテル; 文体的微細加工

Micro motion-systems which have distributed actuators have been studied. These systems include active catheters which move like a snake in blood vessel, tactile display devices which has two-dimensional array actuators, and electrostatic actuators which move like bellows. The main subject of this project is the active catheters which have small multi-joint structures and inner and outer tubes. The joints are Shape Memory Alloy (SMA) coils which shrink by a current heating and the link-joint unit moves in 6 directions. Several types of which links are made of silicon or polymer have been developed. Integrated circuits for communication and control and micro-assembly method have been also developed for the active catheters. The active catheter can be multi-functional by incorporating sensors in it. For the purpose of advanced ultrasonic imaging devices at the end of catheter, microfabrication process for PZT 1-3 composite structures has been developed. Micromachined silicon is used as a mold during sintering of ceramics. Other sensors as small size optical fiber pressure sensors and distributed bending sensors which are made of optical wave guide and Bragg gratings have been also developed.The project on flexible motion systems using distributed actuators was successfully carried out and achievements have been obtained as planned.

对具有分布式执行机构的微运动系统进行了研究。这些系统包括在血管中像蛇一样移动的主动导管，具有二维阵列致动器的触觉显示装置，以及像风箱一样移动的静电致动器。本课题主要研究的是具有小型多关节结构和内外管的主动导管。接头是形状记忆合金（SMA）线圈，通过电流加热收缩，连接接头单元在6个方向上移动。已经开发了几种由硅或聚合物构成的链接类型。有源导管的通信控制集成电路和微装配方法也得到了发展。通过植入传感器，这种主动导管具有多种功能。为了制造先进的导管末端超声成像装置，开发了pzt1 -3复合材料结构的微加工工艺。微机械硅在陶瓷烧结过程中用作模具。其他传感器如小尺寸光纤压力传感器和由光波导和布拉格光栅制成的分布式弯曲传感器也得到了发展。采用分布式作动器的柔性运动系统项目顺利开展，取得了预期成果。

项目成果

M.Esashi(H.C.Hoch ed.): "Nanofabrication and Biosystems ″Microsensors and Microactuators for Biomedical Applications″(担当章)" Cambridge Univ.Press, 423(61-79) (1996)

M.Esashi（H.C.Hoch 编辑）：“纳米制造和生物系统“生物医学应用的微传感器和微执行器”（章节）”剑桥大学出版社，423（61-79）（1996）

峯田 貴: "ウェハプロセスで作成した能動カテーテル用のシリコン多関節構造" 平成10年電気学会全国大会. 200-201 (1998)

Takashi Mineta：“通过晶圆工艺创建的有源导管的硅铰接结构”1998 年日本电气工程师学会全国会议 200-201 (1998)。

K.Park: "An Integrated Communication and Control System for a Multi-link Active Catheter" J.of Micromech.and Microeng.6,2. 345-351 (1996)

K.Park：“多链路主动导管的集成通信和控制系统”J.of Micromech.and Microeng.6,2。

S.Kodoh: "Tactile stimulating device using electro rheological fluid (in Japanese)" The 15th Sensor Symposium Late News. 15. 68 (1997)

S.Kodoh：“使用电流变液的触觉刺激装置（日语）”第 15 届传感器研讨会晚间新闻。

Y.Haga: "Actively bending ultrasound endoscope using shape memory alloy actuator (in Japanese)" J.Med.Ultrasonics. 24. 413 (1997)

Y.Haga：“使用形状记忆合金执行器主动弯曲超声内窥镜（日语）”J.Med.Ultrasonics。