Joint Study on Integrated Clinical Analysis System

综合临床分析系统联合研究

基本信息

批准号：
03044019
负责人：
ESASHI Masayoshi
金额：
$ 4.48万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for international Scientific Research
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1992
项目状态：
已结题

项目摘要

New normally open, normally closed microvalves and a 3-way microvalve have been fabricated by micromachining, These microvalves have a simple structure and small dead volume of the order of tens of nl. Each microvalve is driven by a stack type piezo-actuator and the controllable flow range is from 1 ul/min to tens of ul/min. The channel volume of these valves is from 16 up to 32 nl. A novel sample injector which is an important device in flow injection analysis systems has been developed by applying the 3-way micro valve structure.To fabricate a high pressure micropump, a diaphragm type using passive check valve is studied. A novel check valve is developed. It has a simple structure consists of a silicone rubber float and a through-hole. The reverse flow resistance of this valve was about 10 atm min/ul and the forward to reverse flow ratio was about 1000 at applied pressure of 0.5 atm. These values are 10 to 100 times better than those of the conventional check valves. It is confined that this valve can be applied for a high pressure micropump of available pressure up to at least 1 atm.A new micro liquid flow sensor has been developed. It is a differential pressure type flow sensor which detects the pressure drop at a orifice with a piezoresistive type pressure sensor. The sensor consists of a center diaphragm in which a cross-shaped orifice is formed, a thick surrounding mesa fixed to the flame by a thick beam and surrounding diaphragm connected to the flame. A buried piezo-resistor is formed at the end of the support beam. It was formed by high energy ion implantation. Since the strain caused by differential pressure is concentrated at this point, high pressure sensitivity is obtained. The sensitivity of this sensor is about 8 x 1-0^<-5>. Buried piezoresistive sensor can eliminate the surface instability with out any passivation.

新的通常开放的，通常是闭合的微牛仔和三向微脱离子，已经通过微加工制造，这些微娃娃植物具有简单的结构，而较小的NL阶数量的死亡量很小。每个微脱离子均由堆栈型压电驱动器驱动，可控的流量范围从1 ul/min到数十ul/min。这些阀的通道体积从16到32 nL。通过应用3向微阀结构开发了一种新型的样品注射器，它是流量注射分析系统中重要的设备。为制造高压微型泵，研究了使用被动检查阀的隔膜类型。开发了一个新颖的止回阀。它具有简单的结构，由一个硅胶橡胶浮子和一个孔组成。该阀的反向流电阻约为10 atm/ul，在0.5 atm的施加压力下，向前流动比约为1000。这些值是传统止回阀的值10到100倍。局限性的是，该阀可以用于至少1 Atm的可用压力的高压微量泵。这是一个差压力流动传感器，可检测具有压电类型压力传感器孔口的压力下降。传感器由中心隔膜组成，其中形成了一个横孔的孔，厚厚的台面厚厚的台面由厚的梁固定在火焰上，并与火焰连接的周围隔膜周围。在支撑梁的末端形成了一个埋藏的压电剂。它是由高能离子植入形成的。由于此时由差压力引起的应变浓缩，因此获得了高压灵敏度。该传感器的灵敏度约为8 x 1-0^<-5>。掩埋的压电传感器可以通过任何钝化来消除表面不稳定性。