Joint Study on Integrated Clinical Analysis System

综合临床分析系统联合研究

• 批准号: 03044019
• 负责人: ESASHI Masayoshi
• 金额: $ 4.48万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for international Scientific Research
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03044019/
• 关键词: Clinical Analysis; Integrated System; Micromachining; Microactuator; Micro Flow Control; Microvalve; Micropump; Flow sensor; マイクロアクチュエ-タ; 化学分析

New normally open, normally closed microvalves and a 3-way microvalve have been fabricated by micromachining, These microvalves have a simple structure and small dead volume of the order of tens of nl. Each microvalve is driven by a stack type piezo-actuator and the controllable flow range is from 1 ul/min to tens of ul/min. The channel volume of these valves is from 16 up to 32 nl. A novel sample injector which is an important device in flow injection analysis systems has been developed by applying the 3-way micro valve structure.To fabricate a high pressure micropump, a diaphragm type using passive check valve is studied. A novel check valve is developed. It has a simple structure consists of a silicone rubber float and a through-hole. The reverse flow resistance of this valve was about 10 atm min/ul and the forward to reverse flow ratio was about 1000 at applied pressure of 0.5 atm. These values are 10 to 100 times better than those of the conventional check valves. It is confined that this valve can be applied for a high pressure micropump of available pressure up to at least 1 atm.A new micro liquid flow sensor has been developed. It is a differential pressure type flow sensor which detects the pressure drop at a orifice with a piezoresistive type pressure sensor. The sensor consists of a center diaphragm in which a cross-shaped orifice is formed, a thick surrounding mesa fixed to the flame by a thick beam and surrounding diaphragm connected to the flame. A buried piezo-resistor is formed at the end of the support beam. It was formed by high energy ion implantation. Since the strain caused by differential pressure is concentrated at this point, high pressure sensitivity is obtained. The sensitivity of this sensor is about 8 x 1-0^<-5>. Buried piezoresistive sensor can eliminate the surface instability with out any passivation.

用微机械加工方法制作了新型常开、常闭微阀和三通微阀。这些微阀结构简单，死体积小，可达几十nl。每个微阀是由一个堆栈型压电致动器驱动和可控的流量范围是从1 ul/min到几十ul/min。这些阀门的通道体积是从16到32 nl。采用三通微阀结构，研制了一种新型的流动注射分析系统中的进样器，并对一种采用被动式单向阀的膜片式高压微泵进行了研究。研制了一种新型单向阀。它有一个简单的结构组成的硅橡胶浮子和通孔。该阀的反向流动阻力约为10大气压min/μ l，在施加的压力为0.5大气压时，正向流动与反向流动之比约为1000。这些值比常规止回阀的值好10至100倍。该阀仅适用于1个大气压以上的高压微泵，并研制了一种新型的微型液体流量传感器。它是一种差压式流量传感器，通过压阻式压力传感器检测节流孔处的压降。该传感器由一个中心膜片、一个厚围台面和一个与火焰相连的围膜片组成，中心膜片上有一个十字形小孔，围梅萨由一根厚梁固定在火焰上。支撑梁端部形成埋入式压敏电阻。它是由高能离子注入形成的。由于压差引起的应变集中在这一点，因此获得了高的压力灵敏度。该传感器的灵敏度约为8 × 1-0 ~（-1）<-5>。埋入式压阻传感器可以消除表面不稳定性，无需任何钝化。

项目成果

S.Shoji,B.van der Schoot N.F.de Rooij and M.Esashi: "Smallest Dead Volume Microvalves for Integrated Chemical Analyzing Systems" Digest of technical papers 1991 International Conference on Solidstate Sensors and Actuators.

S.Shoji、B.van der Shoot、N.F.de Rooij 和 M.Esashi：“用于集成化学分析系统的最小死体积微型阀”1991 年国际固态传感器和执行器会议技术论文摘要。

S.SHOJI,M.ESASHI,N.F.de Rooij,B van der Schoot: "Micro Flow Control Devices for Integrated Medical and Chemical Analyzing Systems" Proc.of the IMACS/SICE Int. Symp. on Robotics,Mechatronics and Manufacturing Systems. 617-622 (1992)

S.SHOJI、M.ESASHI、N.F.de Rooij、B van der Shoot：“用于集成医疗和化学分析系统的微流量控制装置”Proc.of the IMACS/SICE Int。

T.NISHIMOTO, S.SHOJI, M.ESASHI: "Buried Piezoresistive Sensors by Means of MeV Ion Implantation" to be presented in Transducers′93 (June-Nokohama) 1993.

T.NISHIMOTO、S.SHOJI、M.ESASHI：“通过 MeV 离子注入实现埋入式压阻传感器”，将于 1993 年 Transducers´93（六月-Nokohama）中发表。