Integrated Inertia Measurement Systems

加速度计和角速率传感器（陀螺仪）是运动控制不可或缺的。本课题的目的是开发具有不同轴向加速度传感器和角速度传感器的集成惯性测量系统。取得了以下成绩：1。基础技术的发展：开发了用于检测地震质量位移的电容式传感器。这种传感器需要薄的电容间隙，这可以通过最小化阳极键合玻璃硅结构的结构畸变来实现。为了控制倾倒，采用了一种新的包装方法来控制空腔压力。研究了硅刻蚀作为深度反应离子刻蚀（RIE）和选择性XeF_2刻蚀。我们的谐振式角速率传感器采用了前一种深度RIE。将这两种蚀刻方法结合起来，可以开发出在晶圆厚度中部制造光束的TBBMM方法。提出了一种不需要外加偏置电压的电化学蚀停方法。这些新的蚀刻技术为传感器的设计提供了自由度。惯性测量系统用于同时测量多轴加速度和角速率的传感器已经开发出来。制备了硅谐振式角速率传感器。采用了电磁、静电和压电激励和电容检测。这些传感器是封装结构，在真空腔中有谐振器。为了提高灵敏度，研究了谐振频率的电调谐。静电悬浮旋转陀螺仪的基础研究本文研究了采用静电悬浮硅片的微机械旋转陀螺仪。对该装置进行了仿真、制作和初步实验。

Accelerometers and angular rate sensors (gyroscopes) are indispensable for motion control. The purpose of this project is to develop integrated inertia measurement sytems which have acceleration sensors and angular rate sensors for diferent axs in it. Following achievements have been obtained.1. Development of basic technologies :Capacitive sensors to detect the displacement of the scismic mass have been developed. This sensor requires thin capacitor gap, which can be attained by minimizing structural distortion of the anodically bonded glass-silicon structure. For dumping control the cavity pressure was controlled by a new packaging method.Silicon etching as deep reactive ion etching (RIE) and selective XeF_2 etching were studied. The former deep RIE was applied for our resonant angular rate sensor. By combining these two etching methods TBBMM method by which beams can be fabricated in the middle part of the wafer thickness could be deeloped. A new electrochemical etch-stop methods which need not external bias voltage was also developed.These new etching technologies gives Freedoms for sensor design.2. Inertia measurement systemsSenors for simultanious measurements of multi-axs accelerations and angular rates have been developed.3. Silicon resonant angular rate sensorResonant angular rate sensors which use silicon tuning forks were fabricated. Electromagnetic, electrostatic and piezoelectric excitations and capacitive detection were emloyed. These sensors are packaged structures which have resonators in vacuum cavities. Electrical tuning of the resonant frequency was studied for improving the sensitivity.4. Basic research for electrostatically levitating rotatinal gyroscopeMicromachined rotational gyroscope using elecrostatically levitating silicon disc has been studied. Simulation, fabrication and priliminary experiments of levitation were made.