权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Ultra Sensing Using Highly Precise Micromachining

使用高精度微机械加工实现超传感

基本信息

批准号：
10305033
负责人：
ESASHI Masayoshi
金额：
$ 24.13万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A).
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10305033/
关键词：
Highly sensitive pressure sensor Accelerometer Gyroscope Precise micromachining Capacitive AFM probe Microprobe for NSOM Nano pattern transfer Nanomachining NSOM用プローブ

项目摘要

Micro structures, which are fabricated using micromachining based on a semiconductor micro fabrication, can move quickly. The micromachining technology makes highly sensitive and quick response sensors feasible. We can fabricate sensor array or capacitive sensors by integrating multiplexer circuits or capacitance detecting circuits respectively. Moreover highly sensitive resonating sensors, servo sensors and self-diagnostic sensors can be made by integrating actuators. Ultra sensing which has higher performancess than conventional sensing technologies has been developed by precise micromachining, integration of different components and nanomachining.Vacuum packaged sensors as capacitive diaphragm vacuum sensors and rotating gyroscopes using electrostatically levitating micro motor have been developed. The latter gyroscope could rotate at 10000 rpm and be used as two axis angular rate sensor and three axis accelerometer.Near field optical microscope which have a small (20 nm diameter) a … More perture at the end of a thin silicon cantilever achieved a high throughput and hence can be applied for optical data storage. Multi microprobe data storage devise which has arrayed thermal prove with small (30 nm) heater at the tip has been developed. The arrayed (32×32) prove needs interconnection to the integrated circuit and for this purpose electrical feedthrough in a Pyrex glass was developed. Thermal recording to a phase change recording media (GeSbTe) which is used for DVD RAM and electrical reading using conductance change were successfully performed.Carbon nanotube was deposited selectively at the end of silicon probe and applied for the SPM (Scanning Probe Microscope). Resonating characteristics of extremely thin (60 nm) silicon cantilevers has been studied High quality factor (Q) up to 250000 was achieved by heating in ultra high vacuum and removing surface natural oxide. This thin high Q resonator is effective for highly sensitive resonating sensors. Micromachined polarization modulators have been developed for the purpose of highly sensitive infrared reflection spectroscopy Less

使用基于半导体微制造的微机械加工制造的微结构可以快速移动。微加工技术使高灵敏度和快速响应的传感器成为可能。我们可以分别通过集成多路复用器电路或电容检测电路来制造传感器阵列或电容传感器。此外，通过集成执行器还可以制成高灵敏度的谐振传感器、伺服传感器和自诊断传感器。通过精密微加工、不同元件的集成和纳米加工，已经开发出比传统传感技术具有更高性能的超传感。真空封装传感器如电容隔膜真空传感器和使用静电悬浮微电机的旋转陀螺仪已经开发出来。后者的陀螺仪可以以 10000 rpm 的速度旋转，可用作两轴角速率传感器和三轴加速度计。近场光学显微镜在薄硅悬臂梁末端具有一个小（直径 20 nm）孔径，实现了高吞吐量，因此可用于光学数据存储。已开发出多微探针数据存储装置，该装置在尖端排列有小型（30 nm）加热器的热证明。阵列（32×32）需要与集成电路互连，为此目的，开发了 Pyrex 玻璃中的电馈通。成功地对用于 DVD RAM 的相变记录介质（GeSbTe）进行了热记录，并利用电导变化进行了电读取。碳纳米管选择性地沉积在硅探针的末端，并应用于 SPM（扫描探针显微镜）。研究了极薄 (60 nm) 硅悬臂梁的谐振特性通过在超高真空中加热并去除表面自然氧化物，可实现高达 250000 的高品质因数 (Q)。这种薄型高 Q 谐振器对于高灵敏度谐振传感器非常有效。微机械偏振调制器已开发用于高灵敏度红外反射光谱学更少