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Ultra Sensing Using Highly Precise Micromachining

使用高精度微机械加工实现超传感

基本信息

批准号：
10305033
负责人：
ESASHI Masayoshi
金额：
$ 24.13万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A).
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10305033/
关键词：
Highly sensitive pressure sensor Accelerometer Gyroscope Precise micromachining Capacitive AFM probe Microprobe for NSOM Nano pattern transfer Nanomachining NSOM用プローブ

项目摘要

Micro structures, which are fabricated using micromachining based on a semiconductor micro fabrication, can move quickly. The micromachining technology makes highly sensitive and quick response sensors feasible. We can fabricate sensor array or capacitive sensors by integrating multiplexer circuits or capacitance detecting circuits respectively. Moreover highly sensitive resonating sensors, servo sensors and self-diagnostic sensors can be made by integrating actuators. Ultra sensing which has higher performancess than conventional sensing technologies has been developed by precise micromachining, integration of different components and nanomachining.Vacuum packaged sensors as capacitive diaphragm vacuum sensors and rotating gyroscopes using electrostatically levitating micro motor have been developed. The latter gyroscope could rotate at 10000 rpm and be used as two axis angular rate sensor and three axis accelerometer.Near field optical microscope which have a small (20 nm diameter) a … More perture at the end of a thin silicon cantilever achieved a high throughput and hence can be applied for optical data storage. Multi microprobe data storage devise which has arrayed thermal prove with small (30 nm) heater at the tip has been developed. The arrayed (32×32) prove needs interconnection to the integrated circuit and for this purpose electrical feedthrough in a Pyrex glass was developed. Thermal recording to a phase change recording media (GeSbTe) which is used for DVD RAM and electrical reading using conductance change were successfully performed.Carbon nanotube was deposited selectively at the end of silicon probe and applied for the SPM (Scanning Probe Microscope). Resonating characteristics of extremely thin (60 nm) silicon cantilevers has been studied High quality factor (Q) up to 250000 was achieved by heating in ultra high vacuum and removing surface natural oxide. This thin high Q resonator is effective for highly sensitive resonating sensors. Micromachined polarization modulators have been developed for the purpose of highly sensitive infrared reflection spectroscopy Less

使用基于半导体微制造的微机械加工制造的微结构可以快速移动。微机械加工技术使高灵敏度和快速响应的传感器成为可能。我们可以通过集成多路复用电路或电容检测电路来制作传感器阵列或电容传感器。此外，高灵敏度的谐振传感器、伺服传感器和自诊断传感器可以通过集成致动器来制造。通过精密微机械加工、集成化和纳米加工等技术的发展，超传感技术已发展成为比传统传感技术性能更高的传感技术，真空封装的传感器如电容式薄膜真空传感器和静电悬浮微电机旋转陀螺仪已被开发出来。后者的陀螺仪可以在10000转/分的转速下旋转，可以用作两轴角速率传感器和三轴加速度计。 ...更多信息在薄硅悬臂末端的穿孔实现了高吞吐量，因此可以应用于光学数据存储。研制了多微探针数据存储器件，该器件具有阵列式热探针，探针尖端具有小的（30 nm）加热器。阵列（32×32）探针需要与集成电路互连，为此，开发了Pyrex玻璃中的电馈通。在相变记录介质（GeSbTe）上进行了热记录和电导阅读实验，并将碳纳米管选择性地沉积在硅探针的末端，用于扫描探针显微镜（SPM）。本文研究了超薄（60 nm）硅单晶的谐振特性。通过超高真空加热和去除表面自然氧化物，获得了高达250000的高品质因数（Q）。这种薄的高Q谐振器对于高灵敏度谐振传感器是有效的。微机械偏振调制器已被开发用于高灵敏度红外反射光谱学Less