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Study on operation of a nano-photonic integrated circuit by optical near field and deposition of semiconductor nano-patterns

光近场操作纳米光子集成电路和半导体纳米图案沉积的研究

基本信息

批准号：
12450029
负责人：
OHTSU Motoichi
金额：
$ 10.56万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450029/
关键词：
optical near field Photonic integrated circuit Quantum dot Optical switch Exciton Waveguide 堆積解離

项目摘要

(1) Novel optical switching device was proposed by utilizing optical near field energy transfer between different sized semiconductor quantum dots. This transfer was measured for CuCl quantum dots by using a low temperature optical near field spectroscopy. Switching time was estimated as 10 ps by our quantum mechanical theory.(2) Chemical vapor deposition by optical near field was developed to fabricate devices in the nanophotonic integrated circuit. Nano-patterns of Zn and Al were deposited. By optimizing the interaction between the depositing atom and substrate surface, minimum deposition size of 25 nm was obtained. For more improvements, technical problems to be solved were found. Non-resonant deposition not by an UV light but by a blue light was found.(3) By oxidizing Zn deposited in (2), the nano-pattern of a blue light emitting ZnO was realized. Exciton emission was observed, which exhibited a quantum-size effect when its size is smaller than 50 nm.(4) A plasmon waveguide was proposed and fabricated in order to use as an input/output terminal of the nano-photonic integrated circuit. Guiding the plasmon of 110 nm spot was observed.(5) By summarizing the results obtained above, future problems for realizing a practical nano-photonic integrated circuit was picked up.

(1)利用不同尺寸半导体量子点之间的近场光能量传递，提出了一种新型的光开关器件。通过使用低温光学近场光谱测量CuCl量子点的这种转移。根据量子力学理论，开关时间约为10 ps。(2)利用光学近场化学气相沉积技术制备纳米光子集成电路中的器件。沉积Zn和Al的纳米图案。通过优化沉积原子与衬底表面的相互作用，获得了25 nm的最小沉积尺寸。为了进一步改进，发现了需要解决的技术问题，发现了非共振沉积，而不是通过紫外光，而是通过蓝光。(3)通过氧化在（2）中沉积的Zn，实现了蓝色发光ZnO的纳米图案。观察到激子发射，当其尺寸小于50 nm时，其表现出量子尺寸效应。(4)提出并制作了一种等离子体激元波导作为纳米光子集成电路的输入/输出端。观察到110 nm光斑的引导等离子体激元。(5)通过总结以上研究结果，提出了实现实用化纳米光子集成电路需要解决的问题。