Establishment of a real time measurement method of carbon film deposition process and its surface modification process during plasma generated in liquid, and the clalification of these processes

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Plasma generated in liquid is a new promising plasma source. However, the reaction measurement is difficult because plasma diagnostics have been developed for low-pressure plasma process. Thereby, we developed a new measurement system for plasma in liquid, using Infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). We succeeded in the measurement of the plasma process: the changes in chemical states of the solution and the chemical states of deposits due to the plasma generation in the solution. We also succeeded in the measurement of the reaction of the plasma with bio-model materials. This result suggests the MIR-IRAS is suitable to diagnostics of plasma in liquid for the bio- and medical application.