Acid Proliferation to Improve the Sensitivity of EUV Resists

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Rate constants for the reaction of the electrons with triphenylsulfoniumtriflate (TPS-Tf) and pinanediol monosulfonates, which consist of tosylate (PiTs) or 4-trifluoromethylbenzenesulfonate (Pi3F), have been measured using pulse radiolysis in liquid tetrahydrofuran to evaluate the kinetic contribution to acid production for extreme ultraviolet (EUV) chemically amplified resists. The long-lived Pi3F・-radical anion efficiently undergoes the electron transfer to TPS-Tf with the rate constant of 6.3 × 10^10M^<-1>s^<-1> to form TPS-Tf・-, which subsequently decomposes to generate TfOH. The novel acid production pathway via the electron transfer from pinanediol monosulfonate radical anions to TPS-Tf is presented.