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Quantum etch plasma simulation

Quantum etch plasma simulation
量子蚀刻等离子体模拟
批准号:
EP/F008961/1
负责人:
Jonathan Tennyson
金额:
$11.94万
依托单位:
依托单位国家:
英国
项目类别:
Research Grant
财政年份:
2007
资助国家:
英国
项目状态:
已结题
起止时间:
2007 至 --

项目摘要

项目成果

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中文摘要
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英文摘要
The project will produce a prototype Quantum-Etch system: a plasma etching model based on accurate quantum models. This etching program will allow academic and industrial researchers to pre-test major design changes in etching systems. The consequence will be a major efficiency gain for the semiconductor industry in designing industrial etching chambers allowing for the most suitable designs to be quickly identified and moved on to lab testing. Project outputs will include a Requirements Analysis following customer interviews, Development Roadmap, Prototype Quantum-Etch system and a detailed Business Plan which will be used to raise further finance for development and marketing.
期刊论文(10)
专著(0)
科研奖励(0)
会议论文
DOI: 10.1093/mnras/stv091
发表时间: 2015
期刊: Monthly Notices of the Royal Astronomical Society
影响因子: 4.8
作者: [Al-Refaie A]
通讯作者: Al-Refaie A
Using a vibrational averaging technique to understand the role of water dimers in atmospheric absorption
使用振动平均技术了解水二聚体在大气吸收中的作用
DOI: --
发表时间: 2010
期刊: ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
影响因子: --
作者: [Kelly Ross E. A.]
通讯作者: Kelly Ross E. A.
Boundary layer flow and heat transfer past a stretching plate with variable thermal conductivity
通过具有可变导热系数的拉伸板的边界层流动和传热
DOI: 10.1016/j.ijnonlinmec.2009.12.006
发表时间: 2010
期刊: International Journal of Non-Linear Mechanics
影响因子: 3.2
作者: [Ahmad N]
通讯作者: Ahmad N
Electron re-scattering from H 2 and CO 2 using R-matrix techniques
使用 R 矩阵技术从 H 2 和 CO 2 进行电子再散射
DOI: 10.1080/09500340601043405
发表时间: 2007
期刊: Journal of Modern Optics
影响因子: 1.3
作者: [Harvey A]
通讯作者: Harvey A
10
    Radiative transport modeling in technological plasmas and combustion
    • 批准号:
      ST/W000504/1
    • 项目类别:
      Research Grant
    • 资助金额:
      $45.94万
    • 财政年份:
      2021
    • 负责人:
      Jonathan Tennyson
    • 依托单位:
    Short wavelength absorption by water vapour
    • 批准号:
      NE/T000767/1
    • 项目类别:
      Research Grant
    • 资助金额:
      $34.78万
    • 财政年份:
      2019
    • 负责人:
      Jonathan Tennyson
    • 依托单位:
    UK Atomic, Molecular and Optical physics R-matrix consortium (UK AMOR)
    • 批准号:
      EP/R029342/1
    • 项目类别:
      Research Grant
    • 资助金额:
      $46.9万
    • 财政年份:
      2018
    • 负责人:
      Jonathan Tennyson
    • 依托单位:
    Integrated software for electron-molecule collisions
    • 批准号:
      ST/R005133/1
    • 项目类别:
      Fellowship
    • 资助金额:
      $41.07万
    • 财政年份:
      2018
    • 负责人:
      Jonathan Tennyson
    • 依托单位:
    海外基金