Compact x-ray nanoscopy

紧凑型 X 射线纳米显微镜

• 批准号: 8746693
• 负责人: HAN WEN
• 金额: $ 5.81万
• 依托单位: NATIONAL HEART, LUNG, AND BLOOD INSTITUTE
• 依托单位国家: 美国
• 资助国家: 美国
• 起止时间: 至
• 项目状态: 未结题
• 来源: https://reporter.nih.gov/project-details/8746693
• 关键词: Atomic Force Microscopy; Biological; Electron Beam; Film; Goals; Gold; Image; Imaging technology; Optics; Phase; Radiation; Reading; Resolution; Sampling; Source; System; nanometer; nanoscale; success

To realize nano scale x-ray imaging on a benchtop scale without highly specialized and costly x-ray optical componenets, we are developing an amplified photoresist film that is sensitive to x-ray and electron beam radiation, and can support nanometer scale features. These features are read accurately quantified by a compact atomic force microscopy. We have achieved initial success in a gold amplified E-beam resist system and obtained radiographs of x-ray gratings at 50 nm resolution. The amplification by a gold photo-conversion layer reduced the required x-ray energy by a factor of 45.

为了在没有高度专业化和昂贵的x射线光学元件的情况下在台式规模上实现纳米级x射线成像，我们正在开发一种对x射线和电子束辐射敏感的放大光刻胶薄膜，并且可以支持纳米级特征。这些特征可以通过紧凑的原子力显微镜精确地量化。我们在金放大电子束抗蚀剂系统中取得了初步成功，并获得了50纳米分辨率的x射线光栅射线照片。金光转换层的放大作用使所需的x射线能量减少了45倍。