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Compact x-ray nanoscopy

Compact x-ray nanoscopy
紧凑型 X 射线纳米显微镜
批准号：
8746693
负责人：
HAN WEN
金额：
$5.81万
依托单位：
NATIONAL HEART, LUNG, AND BLOOD INSTITUTE
依托单位国家：
美国
项目类别：
财政年份：
--
资助国家：
美国
项目状态：
未结题
起止时间：
至
来源：
https://reporter.nih.gov/project-details/8746693
关键词：
Atomic Force MicroscopyBiologicalElectron BeamFilmGoalsGoldImageImaging technologyOpticsPhaseRadiationReadingResolutionSamplingSourceSystemnanometernanoscalesuccess

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英文摘要
To realize nano scale x-ray imaging on a benchtop scale without highly specialized and costly x-ray optical componenets, we are developing an amplified photoresist film that is sensitive to x-ray and electron beam radiation, and can support nanometer scale features. These features are read accurately quantified by a compact atomic force microscopy. We have achieved initial success in a gold amplified E-beam resist system and obtained radiographs of x-ray gratings at 50 nm resolution. The amplification by a gold photo-conversion layer reduced the required x-ray energy by a factor of 45.
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