Electrical contacts to semiconductor nanostructures

与半导体纳米结构的电接触

• 批准号: 345052-2007
• 负责人: Gates, Byron
• 金额: $ 10.93万
• 依托单位: Simon Fraser University
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2006
• 资助国家: 加拿大
• 起止时间: 2006-01-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=325946
• 关键词: Electrical; contacts; semiconductor; nanostructures

This proposal is for a physical vapor deposition system to deposit metal electrical contacts to semiconductor materials and nanostructures we are synthesizing in our laboratories. Our research programs focus on the study of semiconductors, their synthesis, surface chemistry, electronic defects, and incorporation into electronic devices. This work requires forming electrical contacts to nanostructures, such as nanowires, and metal-molecule-semiconductor junctions. Another aspect of our research is characterizing electrical defects within our semiconductor materials and the incorporation of these materials into devices. Our work requires high quality electrical contacts, such as ohmic contacts and Schottky diodes. A physical vapor deposition system capable of depositing multilayers or alloys of high purity metals for electrical contacts onto substrates with optional temperature control is essential to all of these projects. Equipment currently available to us is incapable of fulfilling these requirements. The requested metal evaporation system will enable us to fabricate the electrical contacts we require at SFU and in a timely manner. This system will be unique to Western Canada. Access to this equipment will ensure a higher quality of training for our students with hands-on experience using state-of-the-art equipment, while also enabling them to compete at the forefront of their areas of research.

该提案适用于物理气相沉积系统，用于将金属电接触沉积到我们在实验室合成的半导体材料和纳米结构上。我们的研究项目侧重于半导体及其合成、表面化学、电子缺陷以及与电子设备的结合的研究。这项工作需要形成与纳米结构的电接触，例如纳米线和金属-分子-半导体结。我们研究的另一个方面是表征半导体材料中的电气缺陷以及将这些材料纳入设备中。我们的工作需要高质量的电接触，例如欧姆接触和肖特基二极管。对于所有这些项目来说，物理气相沉积系统至关重要，该系统能够将用于电接触的多层高纯度金属或合金沉积到基材上，并具有可选的温度控制。我们现有的设备无法满足这些要求。所要求的金属蒸发系统将使我们能够在 SFU 及时制造所需的电触点。该系统将是加拿大西部独有的。使用这些设备将确保我们的学生获得更高质量的培训，获得使用最先进设备的实践经验，同时也使他们能够在其研究领域的前沿竞争。