Puled laser micro/submicro manufacturing for MEMS and microelectronics

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The drive for miniaturization in electronics, photonics and biomedical device is spurring an ever growing need for micro/sub micro manufacturing. The research encompasses fundamental and applied research work with an industrial orientation to be able to make significant impact on MEMS and micro electronics industries. One of the major challenges in the area of MEMS and micro electronics lies in miniaturization and fabrication of these devices. Pulsed laser processing provides unique capability for producing features in micro/nano scale to industrial standard. The proposed research program defines a unique operating niche in micro/nanotechnology that cannot be fulfilled by other technologies. The technical expertise gained through this research would be unique and innovative with which new and improved products can be developed. The research work will focus on the following projects:  1) Micro and sub micro manufacturing. Study and develop an alternative technique for sub-micro manufacturing using short pulsed laser. Two fundamental manufacturing methods, effect of radially/tangentially polarised light and the concept of combination of laser ablation and wet etching for micro and submicro manufacturing will be studied in depth. From the study a macular model for high repetition rate laser ablation and managing rules for ultrashort laser oscillator micro/nano manufacturing will be developed 2) Microelectronics and MEMS applications. The fundamental investigations will be applied for thin wafer Dicing/Singulation with increased efficiency, improved quality, high die strength and lower kerfwidth. The other application is for IC Circuit failure analysis, by layer-by-layer removal in an IC circuit without damaging the underlying structures at high efficiency, quality and lower cost. 3) Nanoparticle generation by pulsed laser ablation. Nanoparticles can significantly improve the quality of products and enables new products. In this work we aim to study (Nano particle shape and size) and improve the converting efficiency, and enable mass production of nanoparticles for industrial applications, especially in the aircraft/automobile industry.