Near-field scanning optical microscopy for nanostructure analysis and maskless nanofabrication
Near-field scanning optical microscopy for nanostructure analysis and maskless nanofabrication
批准号:
390598-2010
负责人:
Venkatakrishnan, Krishnan
金额:
$9.18万
依托单位:
依托单位国家:
加拿大
项目类别:
Research Tools and Instruments - Category 1 (<$150,000)
财政年份:
2009
资助国家:
加拿大
项目状态:
已结题
起止时间:
2009-01-01 至 2010-12-31
中文摘要
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英文摘要
The proposed facility will establish nanostructure analysis and maskless nanofabrication system using near-field scanning optical microscopy (NSOM) coupled with an ultrafast laser, and it will be integrated with the existing laser nanomachining facility at Ryerson University.
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Ultrafast laser nanofabrication and its applications
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资助金额:$1.89万
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依托单位:
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项目类别:Discovery Grants Program - Individual
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资助金额:$1.89万
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Puled laser micro/submicro manufacturing for MEMS and microelectronics
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资助金额:$1.35万
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依托单位:
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项目类别:Discovery Grants Program - Individual
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资助金额:$1.35万
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财政年份:2007
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负责人:Venkatakrishnan, Krishnan
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依托单位:
国内基金
海外基金
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