Synthesis of New Precursors for Cobalt and Group 13/15 Thin Films
Synthesis of New Precursors for Cobalt and Group 13/15 Thin Films
批准号:
505346-2016
负责人:
Song, Datong
金额:
$5.77万
依托单位:
依托单位国家:
加拿大
项目类别:
Collaborative Research and Development Grants
财政年份:
2017
资助国家:
加拿大
项目状态:
已结题
起止时间:
2017-01-01 至 2018-12-31
中文摘要
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英文摘要
High quality metallic cobalt thin films have found applications in microelectronic and magnetoresistive devices, while high quality thin films of Group 13-15 materials are important for optoelectronics. The fabrication of such thin films replies on suitable chemical precursors. The proposed research is concerned with the development of new precursors for cobalt metal and Group 13-15 thin film formations.
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资助金额:$3.93万
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海外基金