Microfabricated Surface Plasmon Sensor

本研究的目的是创造一种微型表面等离子体传感器用于生物分析物检测。这将尝试使用微制造技术，类似于在集成电路制造中使用的技术，以及在微机电工程领域的先进技术。该研究包括一个微型光学系统的开发，该系统由一个静电控制的镜子和一个光电二极管阵列组成。如果成功，该装置将消除对大型、昂贵的光学工作台的需求，这通常与表面等离子体共振的检测有关。该传感器还具有极低成本的潜力。该项目将微机械器件与光学、电子和化学相结合，需要一个多学科的团队。这是主动机械元件在微传感器中的早期潜在应用。

The objective of this research is to create a miniature surface plasmon sensor for bioanalyte detection. This will be attempted using microfabrication techniques, similar to those used in the manufacture of integrated circuits, and those advanced in the field of microelectromechanical engineering. The research includes the development of a miniature optical system, consisting of an electrostatically controlled mirror and a photodiode array. If successful, this device will eliminate the need for a large, expensive optical bench, which is usually associated with the detection of surface plasmon resonance. The sensor also has the potential of very low cost. This project integrates micromechanical devices with optics, electronics, and chemistry, and requires a multi-disciplinary team. It is an early potential application of active mechanical elements in a micro-sensor.