Novel Techniques for Polishing Diamond Films

金刚石薄膜被考虑用于光学系统，因为它们的惰性性质，因此它们能够保护重要的光学系统免受恶劣环境的影响。由于不同的沉积技术所产生的杂质、晶粒尺寸和取向的不同，多晶金刚石薄膜会产生散射中心。提出了一种新的表面光滑抛光方法。该技术具有适应轮廓表面的能力，也可以与智能制造系统结合使用。第一阶段的工作将确定可行性；然而，接下来的工作将覆盖大型复杂几何形状，可以在几种光学应用中进行表征和现场测试。

Diamond films are contemplated for use in optical systems due to their inert nature and hence their ability to protect the vital optical systems from the harsh environments. Polycrystalline diamond films produce scattering centers due to the different impurities, grain sizes and orientations that are produced by the different deposition techniques. A novel polishing method is proposed for providing smooth surfaces. This techniques has the capability to be adapted for contoured surfaces and can also be used in combination with intelligent manufacturing systems. Phase I effort will establish the feasibility; however the follow on effort will coat large complex geometries that can be characterized and field tested in several optical applications.