Two-Dimensional Guided Wave Spatial Light Controller Based on SIMOX Processing and Germanium-Silicon Alloys

在第一阶段，首次在硅上实现了完全光隔离和波导间的有效耦合。基于这些成果，电子相位调制波导结构的平行阵列将在第二阶段制造，配置为空间解剖入射相干平面波形。并用于在远场通过相消干涉效应旋转输出光束。相位控制通道的二维阵列将允许在整个图像平面上扫描光束。最初的工作将集中在制造和测试放置在单个埋藏SiO2层上的一维刚性波导水平阵列；该装置具有作为光谱分析仪的潜力，用于在单个光纤通信系统中同时运行的名义1.3 μ m激光信号的多路解复用集。随后，将构建具有两个硅芯的双埋式SIMOX结构，以演示垂直光束转向的高度新颖概念。将两套导向器集成到一个二维结构中，将允许在两个方向上快速灵活地转向。

In Phase I both total optical isolation and efficient guide to guide coupling were accomplished for the first time in silicon. Based upon these achievements, parallel arrays of electronically phase-modulated waveguide structures will be fabricated in Phase II, configured to spatially dissect an incident coherent planar waveform, and used to rotate the output light-beam through constructive interference effects in the far field. A two dimensional array of phase-control channels would allow scanning the beam over the entire image plane. Initial efforts will be focused on fabrication and testing of a one dimensional, horizontal array of rigid waveguides placed over a single buried SiO2 layer; this device has potential as an Optical Spectrum Analyzer for de-multiplexing sets of nominally 1.3 um laser signals running simultaneously in a single fiber communication system. Later, a double buried SIMOX structure with two silicon cores will be constructed to demonstrate the highly novel concept of vertical beam steering. Integration of the two sets of guides into a two dimensional structure will allow rapid agile steering in both directions.